M. Erinc, H. van de Wiel, R. Werkhoven, A. Pongrácz, G. Battistig, H. Fischer
{"title":"一种MEMS三维力传感器的振动特性","authors":"M. Erinc, H. van de Wiel, R. Werkhoven, A. Pongrácz, G. Battistig, H. Fischer","doi":"10.1109/ESIME.2011.5765769","DOIUrl":null,"url":null,"abstract":"MEMS devices and sensors in automotive applications are exposed to vibrations during service life. These vibrations can have a profound effect on the accuracy and reliability of the device. In this study a 3D force sensor, to be used in an automotive tire for the measurement of longitudinal and lateral forces is analysed. The study compromises two parts: First, a numerical analysis is performed to determine Eigen frequencies of the device and a stress strain analysis to determine allowable displacements before the sensor is damaged. Next, Eigen frequencies and mechanical fatigue resistance is evaluated by means of vibration exciter experiments. Additionally, a road test is performed on a test circuit to determine the robustness of the force sensor under actual automotive load conditions while attached to the rims of the wheels.","PeriodicalId":115489,"journal":{"name":"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Vibration characterization of a MEMS 3D force sensor\",\"authors\":\"M. Erinc, H. van de Wiel, R. Werkhoven, A. Pongrácz, G. Battistig, H. Fischer\",\"doi\":\"10.1109/ESIME.2011.5765769\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"MEMS devices and sensors in automotive applications are exposed to vibrations during service life. These vibrations can have a profound effect on the accuracy and reliability of the device. In this study a 3D force sensor, to be used in an automotive tire for the measurement of longitudinal and lateral forces is analysed. The study compromises two parts: First, a numerical analysis is performed to determine Eigen frequencies of the device and a stress strain analysis to determine allowable displacements before the sensor is damaged. Next, Eigen frequencies and mechanical fatigue resistance is evaluated by means of vibration exciter experiments. Additionally, a road test is performed on a test circuit to determine the robustness of the force sensor under actual automotive load conditions while attached to the rims of the wheels.\",\"PeriodicalId\":115489,\"journal\":{\"name\":\"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems\",\"volume\":\"21 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-04-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESIME.2011.5765769\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESIME.2011.5765769","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Vibration characterization of a MEMS 3D force sensor
MEMS devices and sensors in automotive applications are exposed to vibrations during service life. These vibrations can have a profound effect on the accuracy and reliability of the device. In this study a 3D force sensor, to be used in an automotive tire for the measurement of longitudinal and lateral forces is analysed. The study compromises two parts: First, a numerical analysis is performed to determine Eigen frequencies of the device and a stress strain analysis to determine allowable displacements before the sensor is damaged. Next, Eigen frequencies and mechanical fatigue resistance is evaluated by means of vibration exciter experiments. Additionally, a road test is performed on a test circuit to determine the robustness of the force sensor under actual automotive load conditions while attached to the rims of the wheels.
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