卡盘边界条件对宽带片上测量的影响

2021 IEEE 25th Workshop on Signal and Power Integrity (SPI) Pub Date : 2021-05-10 DOI:10.1109/SPI52361.2021.9505192

G. Phung, U. Arz

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引用次数: 1

摘要

虽然最近有很多研究解释了由探针、邻域和环境效应引起的片上测量中的寄生效应，但本文讨论了卡盘边界条件的影响。本文从共面波导(CPW)的测量实例出发，论证了最相关的卡盘参数(即厚度和相对介电常数)如何恶化CPW的s参数。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Impact of Chuck Boundary Conditions on Wideband On-Wafer Measurements

While a lot of investigations have been presented recently explaining the parasitic effects in on-wafer measurements caused by probes, neighborhood and environmental effects, this paper addresses the impact of chuck boundary conditions. Starting from a coplanar waveguide (CPW) measurement example, this paper demonstrates how the most relevant chuck parameters, i.e. thickness and relative permittivity, deteriorate the S-parameters of CPWs.

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2021 IEEE 25th Workshop on Signal and Power Integrity (SPI)

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