一种用于扫描光学和声学显微镜的两轴水浸式MEMS扫描镜

SPIE OPTO Pub Date : 2016-03-15 DOI:10.1117/12.2211752

Song Xu, Chih-Hsien Huang, J. Zou

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引用次数: 0

摘要

快速扫描是超声和光声显微成像非常需要的。传统的微机电系统(MEMS)扫描镜受限于声传播所需的水环境，不能得到广泛应用。本文设计、制作并测试了一种新型的水浸式扫描镜微系统。采用聚合物铰链实现可靠的水下性能。采用两对高强度钕磁片和三个紧凑的射频扼流圈电感驱动反射镜模块。实验结果表明，快速轴在空气中共振频率为350 Hz时机械扫描角可达±15°，在水中共振频率为240 Hz时机械扫描角可达±12.5°。慢轴在空气中共振频率为20 Hz时机械扫描角可达±15°，在水中共振频率为13 Hz时机械扫描角可达±12.5°。两个扫描轴的共振频率差异很大，适合光栅扫描。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy

Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging. Limited by water environment required for acoustic propagation, traditional mircoelectromechanical system (MEMS) scanning mirrors could not be widely used. In this paper, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. Polymer hinges were employed to achieve reliable under water performance. Two pairs of high strength neodymium magnet disc and three compact RF choke inductor were used to actuate mirror module. Experimental results show that the fast axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 350 Hz in air, and ±12.5° at the resonance frequency of 240 Hz in water, respectively. The slow axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 20 Hz in air, and ±12.5° at the resonance frequency of 13 Hz in water, respectively. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.

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