单轴应变pmosfet的低频噪声研究

J. Kuo, W. P. Chen, P. Su
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引用次数: 3

摘要

我们研究了单轴应变pmosfet的低频噪声特性。在低Vgst区,1/f噪声主要由载流子数波动主导,应变器件的SId/Id2随着gm/Id的增强而增加。然而,在给定gm/Id下,应变装置的SId/I}d2与未应变装置的SId/I}d2几乎相同。当施加单轴压缩应变时,由于面外有效质量和隧道障壁高度的增加,衰减长度λ减小。减小的λ可能导致更小的SVg。在高Vgst状态下,1/f噪声主要由迁移率波动主导,应变器件的Hooge参数增大导致SId/Id2增大。
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Investigation of low frequency noise in uniaxial strained PMOSFETs
We have investigated the low frequency noise characteristics for uniaxial strained PMOSFETs. In the low |Vgst| regime, the 1/f noise is dominated by the carrier-number-fluctuations and the SId/Id2 is increased by the enhanced gm/Id for the strained device. Nevertheless, the SId/I}d2 of the strained device is almost the same as the unstrained one at a given gm/Id. Furthermore, with the application of uniaxial compressive strain, the attenuation length λ is reduced because of the increased out-on-plane effective mass and tunneling barrier height. The reduced λ may result in a smaller SVg. In the high |Vgst| regime, the 1/f noise is dominated by the mobility-fluctuations and the SId/Id2 is increased due to the larger Hooge parameter for the strained device.
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