高性能埋置异质结构/spl λ /=1.5 /spl mu/m InGaAs/AlGaInAs应变层量子阱激光二极管

P. Thijs, T. van Dongen, J. Binsma, E. J. Jansen
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引用次数: 10

摘要

当今的光纤通信系统应用需要具有低阈值电流的半导体激光器,并且在宽温度范围内以高速运行,最好是非冷却的。研究了1.3 ~ 1.5 /spl μ m波长量子阱激光二极管InGaAs(P)/InGaAsP和(Al)GaInAs/Al(Ga)InAs的制备方法。尽管存在较难处理的铝,但后一种材料体系主要是由于其较大的导带偏移:/spl Delta/E/sub c/=0.72 /spl Delta/E/sub g/与/spl Delta/E/sub c/=0.35 /spl Delta/E/sub g/在InGaAs/InGaAsP中。结合故意在应变状态下生长的量子阱,这导致更高的特征温度T/sub 0/,从而导致更低的阈值电流和更高的输出功率,特别是在高温下。此外,有源层内的空穴输运和差分增益都得到了增强,从而实现了高速和低啁啾特性。然而,到目前为止,在实际的含铝电信设备中,这些特性尚未得到最佳利用。这些激光器最常见的器件结构是脊波导型,它具有更高的阈值电流,更椭圆和更不稳定的输出光束,并且在电流调制下比埋置异质结构(BH)器件显示更明显的振铃。在本文中,我们报道了低阈值和高功率的faby - perot (FP)和低阈值分布反馈(DFB) 1.5 /spl mu/m应变层InGaAs/AlGaInAs BH激光器,其半绝缘InP电流阻断层完全由低压有机金属气相外延(LP-OMVPE)生长。首次为这些装置的可靠运行提供了证据。
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High performance buried heterostructure /spl lambda/=1.5 /spl mu/m InGaAs/AlGaInAs strained-layer quantum well laser diodes
Today's fibre-optic communication system applications require semiconductor lasers with low threshold current and operating, preferably uncooled, over a wide temperature range at high speed. For the fabrication of 1.3-1.5 /spl mu/m wavelength quantum well laser diodes InGaAs(P)/InGaAsP and (Al)GaInAs/Al(Ga)InAs have been studied. Despite the presence of the more difficult to handle aluminium, the latter material system is mainly of interest because of its larger conduction band offset: /spl Delta/E/sub c/=0.72 /spl Delta/E/sub g/ against /spl Delta/E/sub c/=0.35 /spl Delta/E/sub g/ in InGaAs/InGaAsP. In combination with quantum wells deliberately grown in a state of strain, this results in higher characteristic temperature T/sub 0/, leading to lower threshold current and higher output power, especially at elevated temperatures. Moreover, both the hole transport within the active layer and the differential gain are enhanced, leading to high speed and low chirp characteristics. However, in practical Al-containing telecommunication devices these characteristics have not been optimally exploited so far. The most common device structure for these lasers is of the ridge waveguide type, which has a higher threshold current, a more elliptical and less stable output beam, and shows more pronounced ringing under current modulation than buried heterostructure (BH) devices. In this paper, we report low-threshold and high-power Fabry-Perot (FP) and low-threshold distributed feedback(DFB) 1.5 /spl mu/m strained-layer InGaAs/AlGaInAs BH lasers with semi-insulating InP current-blocking layers completely grown by low-pressure organometallic vapour phase epitaxy (LP-OMVPE). For the first time, evidence for the reliable operation of these devices is presented.
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