电掺杂二维材料隧道晶体管

H. Ilatikhameneh, Fan Chen, R. Rahman, Gerhard Klimeck
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引用次数: 10

摘要

由两个极性相反的栅极组成的类似pn结的电位分布的栅极控制隧道结目前在二维材料器件的制造中占主导地位。在隧道场效应晶体管(tfet)中,由于化学掺杂会在半导体的带隙内引入状态,从而降低tfet的off状态性能,因此电掺杂方法也是首选的。此外,低带隙2D材料更适合用于高性能tfet。因此,本文对双层石墨烯(BLG) TFET进行了研究。本文研究了影响低带隙电掺杂二维晶体管性能的关键设计参数。通过原子模拟表明,当上下栅极有不同的偏置时,影响电门控结性能的关键因素是氧化物的厚度。但是等效氧化层厚度(EOT)决定了BLG中电场相关带隙的大小,因此也不能完全忽略。
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Electrically doped 2D material tunnel transistor
Gate controlled tunnel junctions wherein the PN-junction like potential profile is made by two gates with opposite polarities are currently dominant in the fabrication of 2D material devices. Electrical doping methods are also preferred in tunnel field-effect transistors (TFETs) as chemical doping introduces states within the bandgap of the semiconductor and therefore degrades the OFF-state performance of TFETs. Moreover, low band gap 2D materials are preferable for high performance TFETs. Consequently, bilayer graphene (BLG) TFET is studied in this work. The critical design parameters in the performance of low bandgap electrically doped 2D transistors are investigated here. Through atomistic simulations, it is shown that the key element in the performance of electrically gated junctions is the thickness of the oxide even when the top and bottom gates have different biases. But still the equivalent oxide thickness (EOT) cannot be disregarded completely since it determines the value of the electric field dependent band gap in BLG.
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