C. Comi, A. Corigliano, G. Langfelder, A. Longoni, A. Tocchio
{"title":"MEMS谐振器非线性特性研究","authors":"C. Comi, A. Corigliano, G. Langfelder, A. Longoni, A. Tocchio","doi":"10.1109/ESIME.2011.5765821","DOIUrl":null,"url":null,"abstract":"This work is focussed on the nonlinear dynamic response of electrostatically actuated micro-resonators. A single span beam axially constrained at both end, possibly with elastic constraints, is considered as representative of different common layout of micro-resonators. An analytical model, based on the Hamilton's principle, accounting for mechanical and electrical nonlinearities is derived. The analytical prediction is compared with experimental measurements obtained on a L-shaped micro-resonator.","PeriodicalId":115489,"journal":{"name":"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"On the nonlinear behaviour of MEMS resonators\",\"authors\":\"C. Comi, A. Corigliano, G. Langfelder, A. Longoni, A. Tocchio\",\"doi\":\"10.1109/ESIME.2011.5765821\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work is focussed on the nonlinear dynamic response of electrostatically actuated micro-resonators. A single span beam axially constrained at both end, possibly with elastic constraints, is considered as representative of different common layout of micro-resonators. An analytical model, based on the Hamilton's principle, accounting for mechanical and electrical nonlinearities is derived. The analytical prediction is compared with experimental measurements obtained on a L-shaped micro-resonator.\",\"PeriodicalId\":115489,\"journal\":{\"name\":\"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-04-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESIME.2011.5765821\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESIME.2011.5765821","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This work is focussed on the nonlinear dynamic response of electrostatically actuated micro-resonators. A single span beam axially constrained at both end, possibly with elastic constraints, is considered as representative of different common layout of micro-resonators. An analytical model, based on the Hamilton's principle, accounting for mechanical and electrical nonlinearities is derived. The analytical prediction is compared with experimental measurements obtained on a L-shaped micro-resonator.
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