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引用次数: 4

摘要

只提供摘要形式。在NASA,对更小、成本更低的任务的关注鼓励了微型航天器的发展。MEMS技术在传感器、推进系统和仪器方面的进步使专用微型航天器的概念在不久的将来成为可能。新兴的MEMS技术将微机械加工和纳米制造技术的最新进展与微电子技术以可批量生产的形式集成在一起,被视为设备和仪器小型化的下一步。MEMS技术具有在许多方面实现或增强NASA任务的潜力。该技术允许组件和系统小型化,其主要好处是减小尺寸、质量和功率。MEMS技术还提供了新的功能和增强的性能,无论系统大小如何,对性能的影响都是最大的。最后,随着大规模生产的可用性,微型MEMS仪器带来了重新思考基本测量范式的机会。现在有可能将视野从单一仪器的角度扩展到涉及多节点或分布式系统的角度。分布式系统和任务提供了一个新系统,其中的功能由多种元素实现。在未来,集成电子,光子学和微机械功能到“片上仪器”将提供最终的尺寸,成本,功能和性能优势。本报告讨论了MEMS技术和器件在空间应用中的最新发展和应用。
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MEMS for space applications
Summary form only given. At NASA, the focus for smaller, less costly missions has encouraged the development of microspacecraft. MEMS technology advances in terms of sensors, propulsion systems, and instruments make the notion of a specialized microspacecraft feasible in the immediate future. Emerging MEMS technology offers the integration of recent advances in micromachining and nanofabrication techniques with microelectronics in a mass-producible format, and is viewed as the next step in device and instrument miniaturization. MEMS technology has the potential to enable or enhance NASA missions in numerous ways. The technology allows component and system miniaturization, where the primary benefit is reduction in size, mass and power. MEMS technology also provides new capabilities and enhanced performance, with the greatest impact in performance, regardless of system size. Finally, with the availability of mass-produced, miniature MEMS instrumentation comes the opportunity to rethink fundamental measurement paradigms. It is now possible to expand horizons from a single instrument perspective to one involving multi-node or distributed systems. Distributed systems and missions give a new system in which functionality is enabled by a multiplicity of elements. In the future, integration of electronics, photonics, and micromechanical functionalities into "instruments-on-a-chip" will provide the ultimate size, cost, function and performance advantages. This presentation discusses recent developments and applications of MEMS technologies and devices for space applications.
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