使用SIMOX BOX进行高场电气测试

1995 IEEE International SOI Conference Proceedings Pub Date : 1995-10-03 DOI:10.1109/SOI.1995.526502

J. Yoon, J. Nee, J. Yap, J. E. Chung

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引用次数: 1

摘要

本摘要描述了应用高场电气测试获得BOX计量信息的首次尝试之一，这些信息以前只能通过传统的物理分析获得。电分析的优点有几个:它有一个相对较低的周转时间，并提供关于许多BOX特性的大量统计信息。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Use of high-field electrical testing for SIMOX BOX metrology

This abstract describes one of the first attempts to apply high-field electrical testing to obtain BOX metrological information previously obtainable only via traditional physical analysis. The advantages of electrical analysis are several: it has a relatively low turn-around time, and provides high-volume statistical information about many BOX characteristics.

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1995 IEEE International SOI Conference Proceedings

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