用近场扫描光学显微镜分析异质结激光二极管的层组成和模式结构

M. Unlu, B. Goldberg, W. Herzog, H. Ghaemi, E. Towe
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引用次数: 0

摘要

利用近场扫描光学显微镜(NSOM)的超分辨率分析了高功率应变(In,Ga)As激光器的模式结构和层组成。该激光器被设计为泵浦掺铒光纤放大器,其配置优化为单一横向激光模式。在高电流水平下,由于光斑尺寸的扩大和多个横向模式的开始,耦合效率降低。亚微米收集模式成像和发射模式结构的光谱映射作为激光脉冲长度和电流的函数,很容易识别出观察到多个横向模式的操作制度。多个横模的演化与L-I曲线上观察到的扭结一致。近场显微镜使模式轮廓和光谱图像与100纳米分辨率的器件层结构相关。
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Layer composition and mode structure analysis of heterojunction laser diodes by near field scanning optical microscopy
Reports mode structure and layer composition analysis of high power strained (In,Ga)As lasers using the super-resolution capabilities of near field scanning optical microscopy (NSOM). The lasers are designed to pump erbium doped fiber amplifiers in a configuration optimized for a single transverse laser mode. At high current levels, coupling efficiency decreases due to broadening of the spot size and the onset of multiple transverse modes. Sub-micron collection mode imaging and spectroscopic mapping of the emission mode structure as a function of laser pulse length and current easily identify a regime of operation where multiple transverse modes are observed. The evolution of multiple transverse modes coincides with a kink observed in the L-I curve. Near field microscopy enables the mode profile and spectral image to be correlated with the layer structure of the device with 100 nm resolution.
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