1×16 Arrays of GaAs/AlGaAs Multiple Quantum Well Optical Modulators with 26:1 Contrast

Optical modulators fabricated from GaAs/AIGaAs multiple quantum well (MQW) structures have been operated in transmission,1 reflection,2 waveguide,3 and Fabry-Perot resonator4 modes with maximum contrast ratios ranging from 5 to 10. Small arrays of these devices have also been reported,5 but with lower contrasts and relatively little data on uniformity. Large arrays with high contrast and uniformity are required in optical computing and signal processing applications. In this work we report the fabrication of 16 x 16 arrays of transmission and reflection modulators with a maximum contrast ratio of 26. This is believed to be the largest room temperature contrast ever achieved in a MQW device. We have also made measurements of the uniformity of 1x16 columns of modulators from these arrays and have demonstrated that device-to-device variations in the transmission arrays are approximately 1% of the average transmission.