InP/InGaAs横向双势垒异质结构中的共振隧道效应

T. Broekaert, J. Randall, E. Beam, D. Jovanovic, B.D. Smith
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引用次数: 1

摘要

为了实现更高的密度,集成电路中电子器件的持续缩小最终导致量子效应发挥重要作用的电子器件。这些量子效应可以被利用来增加电子器件和电路的功能,从而产生高密度(多值)逻辑和存储功能。横向共振隧道二极管和晶体管是两种量子效应器件,非常适合于这项任务,也是理想的平面集成。本文首次证明了一种平面横向双势垒异质结构。在4.2 K时,观察到I-V特性中的共振峰谷电流比高达3.5,这归因于2D/1D/2D系统中的谐振隧道效应。基于InP衬底的器件结构由InP/lnGaAs/InP MODFET结构组成,其中通过蚀刻和再生技术集成了由InP势垒和InGaAs以及触点组成的横向双势垒异质结构。这一演示为横向谐振隧道晶体管的制造开辟了道路。
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Resonant tunneling in InP/InGaAs lateral double barrier heterostructures
Continued down-scaling of electron devices in integrated circuits in order to achieve higher density eventually results in electron devices in which quantum effects play a significant role. These quantum effects can be exploited and used to increase the functionality of electronic devices and circuits resulting in high-density (multi-valued) logic and memory functions. The lateral resonant tunneling diode and transistor are two quantum effect devices that are well suited for this task and are also ideal for planar integration. A planar lateral double barrier heterostructure is demonstrated here for the first time. Resonances in the I-V characteristics are observed that have peak to valley current ratios as high as 3.5 at 4.2 K and are attributed to resonant tunneling in a 2D/1D/2D system. The InP substrate based device structure consists of an InP/lnGaAs/InP MODFET structure within which a lateral double barrier heterostructure, consisting of InP barriers and InGaAs well and contacts, has been integrated by etch and regrowth techniques. This demonstration opens the way for the fabrication of the lateral resonant tunneling transistor.
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