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引用次数: 11

摘要

基于角拼接数据结构,提出了一种计算版图关键区域的几何方法。所提出的方法的运行时间与布局中的模式数量呈线性关系。考虑了多层效应,使得每个蒙版层计算的临界面积更加准确。实验结果表明,该方法在布局敏感性分析、产量估计和实际故障分析等方面具有较好的应用前景。
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Fast multi-layer critical area computation
Based on the corner-stitching data structure, a geometrical approach to compute the critical area of a layout is presented. The run time of the proposed approach is linear to the number of patterns in a layout. Multilayer effect is taken into account so that the critical area computed for each mask layer is more accurate. The experimental results show that the method is promising for layout sensitivity analysis, yield estimation and realistic fault analysis.
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