计划回收测试晶圆的产量

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI:10.1109/SMTW.2004.1393750

Muh-Cherng Wu, C. Chien, K. Lu

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摘要

针对测试晶圆回收过程中良率提升方案的选择，提出了一个决策问题，并提出了两种求解方法。决策问题是确定每个回收过程的良率改进目标，以尽量减少测试晶圆的使用

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Planning yields in recycling test wafers

This paper formulates a decision problem and proposes two solution methods for selecting the yield improvement alternatives in the test wafer recycle processes. The decision problem is to determine the yield improvement target for each recycle process in order to minimize the use of test wafers

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2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)

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