细窄SOI mosfet中的量子线效应

X. Baie, J. Colinge, V. Bayot, E. Grivei
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引用次数: 28

摘要

如果半导体样品的尺寸减小到一定程度,就会出现包括量化效应在内的低维效应。这些效应以电导振荡的形式表现出来。它们在室温下以纳米尺度出现。然而,当温度充分降低时,可以在100纳米尺度的器件中观察到量化效应。本文对SOI量子线mosfet进行了测量和仿真。
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Quantum-wire effects in thin and narrow SOI MOSFETs
If the dimensions of a semiconductor sample are reduced sufficiently, low-dimensionality effects involving quantization effects start to appear. These effects manifest themselves in the form of conductance oscillations. They appear at nanometer-scale dimensions at room temperature. However, it is possible to observe quantization effects in 100-nm-scale devices when the temperature is reduced sufficiently. In this paper measurements and simulations have been applied to SOI quantum wire MOSFETs.
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