黑磷场效应晶体管的p型表面电荷转移掺杂

Yuchen Du, Lingming Yang, Hong Zhou, P. Ye
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引用次数: 0

摘要

本文提出了一种化学掺杂黑磷(BP)的新方法,可显著提高低层BP场效应晶体管(fet)的器件性能。通过应用2,3,5,6-四氟-7,7,8,8-四氰喹诺二甲烷(F4-TCNQ),获得了低导通电阻和高场效应迁移率,其中迁移率从181.1 cm2/Vs增加到228.5 cm2/Vs,导通电阻从7.4 Ω·mm降低到3.2 Ω·mm,实现了531.8 mA/mm的高漏极电流,通道长度为1.5 μm。此外,在p型表面电荷转移掺杂后,传递长度法(TLM)结构的薄膜电阻降低了2.9倍,接触电阻降低了近1.3倍。
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P-type surface charge transfer doping of black phosphorus field-effect transistors
In this work, a new approach to chemically dope black phosphorus (BP) is presented which significantly enhances device performance of few-layer BP field-effect transistors (FETs). By applying 2,3,5,6-tetrafluoro-7,7,8,8-tetracyanoquinodimethane (F4-TCNQ), low on-state resistance and high field-effect mobility are achieved, where the mobility has been increased from 181.1 cm2/Vs to 228.5 cm2/Vs and the on-state resistance has been decreased from 7.4 Ω·mm down to 3.2 Ω·mm achieving a record high drain current of 531.8 mA/mm with a moderate channel length of 1.5 μm. In addition, transfer length method (TLM) structure has demonstrated a 2.9 times reduction in sheet resistance, and nearly 1.3 times decrease in contact resistance upon p-type surface charge transfer doping of BP FETs.
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