S. Hirsch, S. Doerner, D.J. Salazar Velez, R. Lucklum, B. Schmidt, P. Hauptmann, V. Ferrari, M. Ferrari
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Thick-film PZT transducers for silicon micro machined sensor arrays
Thick-film piezoelectric transducers have been produced and tested for implementation into a MEMS ultrasonic sensor array. The arrays are intended to be used for beam forming in sensing applications for fluidics in channels at millimeter or micrometer scale (e.g. flow rate measurement, detection of beads, bubbles). Stripe and matrix aligned elements have been fabricated for one-dimensional and two-dimensional beam steering, respectively. In this contribution we further concentrate on an improved Q-factor and PZT layer homogeneity as a major requirement for the transducer elements
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