SOI充电预防:芯片级网络跟踪和二极管保护

T. Hook, H. Bonges, D. Harmon, W. Lai
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引用次数: 3

摘要

在本文中,我们证明了SOI FET在处理过程中是导电的,并且FET在另一个晶体管的栅极和源/漏极上分流,实际上可以保护该器件免受充电损坏。
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SOI charging prevention: chip-level net tracing and diode protection
In this paper we show that the SOI FET is conductive during processing, and also that a FET shunted across the gate and source/drain of another transistor does in fact protect that device against charging damage.
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