不同气候区洁净室控制的注意事项

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI:10.1109/SMTW.2004.1393718

Chun-Hung Tsai, Kung-Yao Chung, Chun-Mine Wang

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引用次数: 3

摘要

洁净室控制系统应根据不同的气候区进行设计。这项工作调查了气候差异如何影响补充空气单元(MAU)的设计，它控制洁净室的温度和湿度。我们推荐适合世界各地不同气候地区的设计。建立了不同气候区MAU设计数据库。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Considerations for cleanroom control in different climatic regions

The cleanroom control systems should be designed according to different climatic regions. This work investigates how the climatic difference affects the design of the make-up-air unit, MAU, which controls temperature and humidity in a cleanroom. We recommend suitable designs for different climatic regions around the world. We also establish a database for MAU design of different climatic regions.

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2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)

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