柔性印刷电路上的薄硅传感器——两种键合方法的研究

A. Schneider, Dan Beckett, Andrew V. Hill, M. Borri, R. Lemmon, J. Lipp, M. Chartier
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摘要

达斯伯里实验室(DL)和卢瑟福阿普尔顿实验室(RAL)几十年来一直在为粒子物理实验开发和建造辐射探测器。这包括跟踪探测器,它记录高能粒子的路径,以便定位衰变过程的顶点。这些跟踪探测器需要有较低的材料预算,以尽量减少散射。最先进的系统包括薄型CMOS传感器(约为10nm)。$100 \mu \ mathm {m}$厚),这需要连接到一个薄(大约。$150 \mu \ mathm {m})$柔性印刷电路(FPC)板,该板依次电连接到数据采集系统。探测器组件的厚度和FPC板的灵活性为这些探测器的组装带来了挑战。对于这里描述的探测器,2x2 CMOS传感器芯片阵列(每个30mm x 15mm)被安装到创建模块的FPC上。芯片被放置在彼此靠近的位置(大约。$150 \mu \ mathm {m}$ gap)。本文研究了倒装芯片键合来组装和互连这些模块,作为粒子物理中使用的标准线键合技术的替代方案。为此,比较了两种不同的方法。方法1:这被认为是标准方法,其中CMOS传感器最初用粘合剂粘合到FPC板上,随后它们的接触垫通过大通孔与FPC连接。方法2:这是本研究中探索的一种替代技术,首先将导电粘合剂印刷在FPC的接触片上,然后将CMOS传感器与FPC进行高精度对准的倒装芯片粘合。在此之前,CMOS传感器上的触点垫配有金螺柱。这里报告的是关于相对于标准方法1的建议方法2的优点和缺点的考虑。这包括债券收益率,探测器模块的机械稳定性(传感器与FPC的粘附性),以及过程的复杂性。
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Thin Si Sensors on Flexible Printed Circuits – Study of Two Bond Methods
Daresbury Laboratory (DL) and Rutherford Appleton Laboratory (RAL) have developed and built radiation detectors for experiments in particle physics since decades. This includes tracker detectors which record the pathway of high energy particles in order to locate the vertexes of decay processes. These tracker detectors need to have low material budget in order to minimize scattering. The most advanced systems comprise thin CMOS sensors (approx. $100 \mu \mathrm{m}$ thick) which require interconnection to a thin (approx. $150 \mu \mathrm{m})$ Flexible Printed Circuit (FPC) board which is in turn electrically connected to the data acquisition system. The thickness of detector components and flexibility of the FPC board create challenges for the assembly of these detectors. For detectors described here, an array of 2x2 CMOS sensor chips (each 30mm x 15mm) is mounted onto an FPC creating a module. The chips are positioned in close proximity to each other (approx. $150 \mu \mathrm{m}$ gap). This paper investigates flip-chip bonding to assemble and interconnect these modules as an alternative to the standard wire bonding technique used in particle physics. For this purpose, two different methods are compared.Method 1: This is considered as the standard method where CMOS sensors are initially bonded to the FPC board with adhesive and subsequently their contact pads are wire bonded to the FPC through large via.Method 2: This is an alternative technique explored in this work where an electrically conductive adhesive is initially printed onto contact pads of the FPC and CMOS sensors are subsequently flip-chip bonded with high precision alignment to the FPC. Prior to this, contact pads on the CMOS sensor are fitted with gold studs.Reported here are considerations on the advantages and disadvantages of the proposed method 2 with respect to the standard method 1. This includes bond yield, mechanical stability of the detector module (adhesion of sensors to FPC), and complexity of the process.
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