利用模具良率预测优化晶圆探头测试产品质量

A. Singh, C. M. Krishna
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引用次数: 13

摘要

我们提出了一种新的自适应测试方法,利用空间缺陷聚类信息来优化晶圆探针测试过程中的测试长度。对于相同的平均测试长度,我们的方法在平均缺陷水平上表现出比两倍的改进要好。它进一步允许分离高质量的模具,其缺陷水平比生产运行的平均水平好一个数量级。我们的建议与所有其他改善缺陷质量的方法是正交的,并且可以与它们结合起来。
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On Optimizing Wafer-Probe Testing for Product Quality Using Die-Yield Prediction
We propose a new adaptive testing procedure that uses spatial defect clustering information to optimize test lengths during wafer-probe testing. For the same average test lengths, our approach shows better than a factor-of-two improvement in average defect levels. It further allows the separation of high-quality dies with defect levels more than an order of magnitude better than the average for the production run. Our proposal is orthogonal to all other approaches for improving defect quality and can be combined with them.
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