G. A. Candela, D. Chandler-Horowitz, J. Marchiando, D. Novotny, Barbara J. Belzer, M. Croarkin
{"title":"SRM-2530的制备和认证,椭偏参数Δ和ψ,以及硅表面二氧化硅层的厚度和折射率","authors":"G. A. Candela, D. Chandler-Horowitz, J. Marchiando, D. Novotny, Barbara J. Belzer, M. Croarkin","doi":"10.6028/NBS.SP.260-109","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":212922,"journal":{"name":"National Bureau of Standards, Special Publication","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1988-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"Preparation and certification of SRM-2530, ellipsometric parameters Δ and ψ and derived thickness and refractive index of a silicon dioxide layer on silicon\",\"authors\":\"G. A. Candela, D. Chandler-Horowitz, J. Marchiando, D. Novotny, Barbara J. Belzer, M. Croarkin\",\"doi\":\"10.6028/NBS.SP.260-109\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":212922,\"journal\":{\"name\":\"National Bureau of Standards, Special Publication\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1988-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"National Bureau of Standards, Special Publication\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.6028/NBS.SP.260-109\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"National Bureau of Standards, Special Publication","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.6028/NBS.SP.260-109","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Preparation and certification of SRM-2530, ellipsometric parameters Δ and ψ and derived thickness and refractive index of a silicon dioxide layer on silicon