Modeling of Heat Transfer for a Three-Dimensional Microelectromechanical Mirror Element with Consideration of Its Packaging Features

Abstract—

In a previous study, the authors demonstrated the steps necessary to determine the performance characteristics of a micromechanical mirror element. The mirror is made up of two bimorph structures consisting of aluminum and silicon dioxide, with a reflective element coated in aluminum attached to movable beams. By applying voltage to electrical heating elements within the beams, the structure can be manipulated due to uneven expansion of the materials. In this study, finite element analysis software is used to simulate the mirror and compare the results with analytical methods. The importance of accurate parameter calculation in designing micromechanical devices is emphasized. The study shows that the deflection sweep, overheating values, and heating/cooling times of the mirror beams align with previously calculated analytical expressions and experimental results. This suggests that the analytical method described in previous studies can be applied to designing micromechanical devices that rely on thermal principles and require precise temperature control for optimal performance. Also the package characteristics are considered and guidelines for it are given with consideration to mirror performance.