SOI 无结 FinFET 中阈值电压和阈下摆动的改进型傅里叶级数分析模型

IF 2.7 Q2 PHYSICS, CONDENSED MATTER Micro and Nanostructures Pub Date : 2024-04-26 DOI:10.1016/j.micrna.2024.207848
Shara Mathew, Sriraj Chennamadhavuni, Rathnamala Rao
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引用次数: 0

摘要

本研究针对硅绝缘体(SOI)衬底上的无结鳍式场效应晶体管(JLFinFET),开发了基于傅立叶级数的阈值电压(Vth)和次阈值波动(SS)分析模型,并考虑了沟道中电流传导的起始位置。我们进行了严格的模拟,以分析 JLFinFET 超过阈值电压时的电流传导路径。根据这些模拟结果,对用于推导阈值电压模型的阈值电压条件进行了修改。与现有模型相比,修改后的模型能更好地预测 JLFinFET 的 Vth 值,因为现有模型不包括基于电流传导起始位置的近似值。为 SS 建立的分析模型还能密切预测从 TCAD 模拟器获得的 JLFinFET 的 SS,最小可达到 20 nm 栅极长度。
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An improved Fourier series-based analytical model for threshold voltage and sub-threshold swing in SOI junctionless FinFET

In this work, Fourier series-based analytical models for threshold voltage (Vth) and Sub-threshold Swing (SS) are developed for Junctionless Fin Field Effect Transistor (JLFinFET) on Silicon On Insulator (SOI) substrate, taking into account the location of the onset of current conduction in the channel. Rigorous simulations were conducted to analyse the current conduction path when JLFinFET surpasses the threshold voltage. Based on the findings from these simulations, threshold voltage condition used for deriving the threshold voltage model is modified. This modified model gives a better prediction of Vth for JLFinFET than the already existing model which doesn't include approximations based on the location of onset of current conduction. The analytical model developed for SS is also capable of closely predicting the SS of JLFinFET obtained from the TCAD simulator down to a gate length of 20 nm.

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