Numerical study on gas reaction path of InN-MOVPE with three typical reactors

This study investigates the controversies about the gas-phase reaction path in the InN MOVPE process. Numerical modeling of the reaction-transport processes in three typical reactors was conducted for main reaction paths. By comparisons of the molar concentrations of the major In-containing species, it was determined that the different approaches of the gas mixing and heating led to three distinct reaction paths. When the non-premixed gas precursors are heated very fast upon entering the reactor, the adduct/amide formation path predominates and the pyrolysis path is negligible (Path 1). When the precursors are mixed at room temperature and heated gradually, the adduct TMIn:NH₃ dissociates back into TMIn, with the pyrolysis path dominating. However, the formation of amides DMInNH₂ intensifies the generation of nanoparticles (Path 2). When mixing occurs at warm temperature and heated fast, both the pyrolysis and adduct paths co-exist, but their effects are different (path 3). In the CCS reactor the dominant reaction path will be Path 1, while in the vertical reactor with a greater height, Path 2 is predominant. In the pre-mixed horizontal reactor, Path 3 is dominant, the pyrolysis path forms a competition with the adduct path near the substrate, and the adduct path dominating at the top of the reactor.