利用焦耳热金纳米片设计低功耗 H2S 传感器的热敏器件

IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Japanese Journal of Applied Physics Pub Date : 2024-06-24 DOI:10.35848/1347-4065/ad53b1
Taro Kato, Takahisa Tanaka and Ken Uchida
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引用次数: 0

摘要

我们展示了焦耳加热金纳米片 H2S 传感器的低功耗操作。我们证实,与均匀加热的金纳米片相比,焦耳加热金纳米片中的低温区域会导致较低的响应和恢复特性。通过使用热导率比金低的铂电极,可以抑制电极的热耗散,从而降低功耗并加快恢复特性。然后,我们通过建立电阻和热阻的分析模型,讨论了最佳传感器结构。我们在通道和焊盘电极之间引入了半椭圆形中间电极,以有效抑制散热,证明了最佳通道长度和中间电极的导热系数κint取决于通道宽度。最后,我们提出了考虑电阻和热阻κint相关性的传感器设计策略。这种策略对所有金属纳米片传感器都很有用,因为它能估算出传感器的最佳结构。
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Thermal-aware device design of low-power H2S sensors using Joule-heated Au nanosheet
We demonstrated Joule-heated Au nanosheet H2S sensors for low-power operation. We confirmed that low temperature regions in the Joule-heated Au nanosheet caused lower response and recovery characteristics than uniformly heated Au nanosheets. By using Pt electrodes, which has lower thermal conductivity than Au, heat dissipation to the electrodes could be suppressed, resulting in lower power consumption and faster recovery characteristics. We then discussed the optimal sensor structure by developing an analytical model of electrical and thermal resistances. We introduced semi-elliptical intermediate electrodes between the channel and pad electrodes to efficiently suppress the heat dissipation, demonstrating that the optimal channel length and thermal conductivity of the intermediate electrode κint exist depending on the channel width. Finally, we proposed the sensor design strategy of considering the κint dependences of the electrical and thermal resistances. This strategy is useful for all metal nanosheet sensors because it gives an estimation of their optimal structures.
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来源期刊
Japanese Journal of Applied Physics
Japanese Journal of Applied Physics 物理-物理:应用
CiteScore
3.00
自引率
26.70%
发文量
818
审稿时长
3.5 months
期刊介绍: The Japanese Journal of Applied Physics (JJAP) is an international journal for the advancement and dissemination of knowledge in all fields of applied physics. JJAP is a sister journal of the Applied Physics Express (APEX) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP). JJAP publishes articles that significantly contribute to the advancements in the applications of physical principles as well as in the understanding of physics in view of particular applications in mind. Subjects covered by JJAP include the following fields: • Semiconductors, dielectrics, and organic materials • Photonics, quantum electronics, optics, and spectroscopy • Spintronics, superconductivity, and strongly correlated materials • Device physics including quantum information processing • Physics-based circuits and systems • Nanoscale science and technology • Crystal growth, surfaces, interfaces, thin films, and bulk materials • Plasmas, applied atomic and molecular physics, and applied nuclear physics • Device processing, fabrication and measurement technologies, and instrumentation • Cross-disciplinary areas such as bioelectronics/photonics, biosensing, environmental/energy technologies, and MEMS
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