低工作电压的溅射沉积碘化铜薄膜晶体管

IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Solid-state Electronics Pub Date : 2024-10-21 DOI:10.1016/j.sse.2024.109014
Zachary C. Adamson , Rotem Zilberberg , Iryna Polishchuk , Natalia Thomas , Kyumin Kim , Alexander Katsman , Boaz Pokroy , Alexander Zaslavsky , David C. Paine
{"title":"低工作电压的溅射沉积碘化铜薄膜晶体管","authors":"Zachary C. Adamson ,&nbsp;Rotem Zilberberg ,&nbsp;Iryna Polishchuk ,&nbsp;Natalia Thomas ,&nbsp;Kyumin Kim ,&nbsp;Alexander Katsman ,&nbsp;Boaz Pokroy ,&nbsp;Alexander Zaslavsky ,&nbsp;David C. Paine","doi":"10.1016/j.sse.2024.109014","DOIUrl":null,"url":null,"abstract":"<div><div>This paper reports on a back-gated p-type thin film transistor (TFT) with copper iodide (CuI) as the channel material, a HfO<sub>2</sub> gate dielectric layer, and Al<sub>2</sub>O<sub>3</sub> passivation. The γ-CuI channel was deposited from a CuI target using DC magnetron sputtering at room temperature. Our TFT can be fully shut off by V<sub>G</sub> = 4 V, with a field-effect channel hole mobility μ<sub>h</sub> ∼ 1.5–2 cm<sup>2</sup> V<sup>−1</sup> s<sup>−1</sup>. An anneal in forming gas was performed twice, once at 200 °C, then at 250 °C to improve gate control, yielding a final I<sub>on</sub>/I<sub>off</sub> current ratio of ∼ 250. The anneal served two purposes: to reduce the oxygen acceptor density in the CuI channel and reduce the concentration of interface states between the CuI, Al<sub>2</sub>O<sub>3</sub> passivation, and HfO<sub>2</sub>. A model of the device was built in an industrial TCAD simulator, which reproduces the measured characteristics and allows an estimation of interface state densities and channel doping.</div></div>","PeriodicalId":21909,"journal":{"name":"Solid-state Electronics","volume":"221 ","pages":"Article 109014"},"PeriodicalIF":1.4000,"publicationDate":"2024-10-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Sputter-Deposited copper iodide thin film transistors with low Operating voltage\",\"authors\":\"Zachary C. Adamson ,&nbsp;Rotem Zilberberg ,&nbsp;Iryna Polishchuk ,&nbsp;Natalia Thomas ,&nbsp;Kyumin Kim ,&nbsp;Alexander Katsman ,&nbsp;Boaz Pokroy ,&nbsp;Alexander Zaslavsky ,&nbsp;David C. Paine\",\"doi\":\"10.1016/j.sse.2024.109014\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This paper reports on a back-gated p-type thin film transistor (TFT) with copper iodide (CuI) as the channel material, a HfO<sub>2</sub> gate dielectric layer, and Al<sub>2</sub>O<sub>3</sub> passivation. The γ-CuI channel was deposited from a CuI target using DC magnetron sputtering at room temperature. Our TFT can be fully shut off by V<sub>G</sub> = 4 V, with a field-effect channel hole mobility μ<sub>h</sub> ∼ 1.5–2 cm<sup>2</sup> V<sup>−1</sup> s<sup>−1</sup>. An anneal in forming gas was performed twice, once at 200 °C, then at 250 °C to improve gate control, yielding a final I<sub>on</sub>/I<sub>off</sub> current ratio of ∼ 250. The anneal served two purposes: to reduce the oxygen acceptor density in the CuI channel and reduce the concentration of interface states between the CuI, Al<sub>2</sub>O<sub>3</sub> passivation, and HfO<sub>2</sub>. A model of the device was built in an industrial TCAD simulator, which reproduces the measured characteristics and allows an estimation of interface state densities and channel doping.</div></div>\",\"PeriodicalId\":21909,\"journal\":{\"name\":\"Solid-state Electronics\",\"volume\":\"221 \",\"pages\":\"Article 109014\"},\"PeriodicalIF\":1.4000,\"publicationDate\":\"2024-10-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Solid-state Electronics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0038110124001631\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Solid-state Electronics","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0038110124001631","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

摘要

本文报告了一种以碘化铜(CuI)为沟道材料、HfO2 栅极电介质层和 Al2O3 钝化层的背栅 p 型薄膜晶体管(TFT)。γ-CuI沟道是在室温下利用直流磁控溅射技术从CuI靶上沉积下来的。我们的 TFT 可以在 VG = 4 V 时完全关闭,其场效应沟道空穴迁移率 μh ∼ 1.5-2 cm2 V-1 s-1。在成型气体中进行了两次退火,一次是在 200 ℃,另一次是在 250 ℃,以改善栅极控制,最终离子/关断电流比为 ∼ 250。退火有两个目的:降低 CuI 沟道中的氧受体密度;降低 CuI、Al2O3 钝化层和 HfO2 之间的界面态浓度。在工业 TCAD 模拟器中建立了该器件的模型,该模型再现了测量到的特性,并允许对界面态密度和沟道掺杂进行估计。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Sputter-Deposited copper iodide thin film transistors with low Operating voltage
This paper reports on a back-gated p-type thin film transistor (TFT) with copper iodide (CuI) as the channel material, a HfO2 gate dielectric layer, and Al2O3 passivation. The γ-CuI channel was deposited from a CuI target using DC magnetron sputtering at room temperature. Our TFT can be fully shut off by VG = 4 V, with a field-effect channel hole mobility μh ∼ 1.5–2 cm2 V−1 s−1. An anneal in forming gas was performed twice, once at 200 °C, then at 250 °C to improve gate control, yielding a final Ion/Ioff current ratio of ∼ 250. The anneal served two purposes: to reduce the oxygen acceptor density in the CuI channel and reduce the concentration of interface states between the CuI, Al2O3 passivation, and HfO2. A model of the device was built in an industrial TCAD simulator, which reproduces the measured characteristics and allows an estimation of interface state densities and channel doping.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Solid-state Electronics
Solid-state Electronics 物理-工程:电子与电气
CiteScore
3.00
自引率
5.90%
发文量
212
审稿时长
3 months
期刊介绍: It is the aim of this journal to bring together in one publication outstanding papers reporting new and original work in the following areas: (1) applications of solid-state physics and technology to electronics and optoelectronics, including theory and device design; (2) optical, electrical, morphological characterization techniques and parameter extraction of devices; (3) fabrication of semiconductor devices, and also device-related materials growth, measurement and evaluation; (4) the physics and modeling of submicron and nanoscale microelectronic and optoelectronic devices, including processing, measurement, and performance evaluation; (5) applications of numerical methods to the modeling and simulation of solid-state devices and processes; and (6) nanoscale electronic and optoelectronic devices, photovoltaics, sensors, and MEMS based on semiconductor and alternative electronic materials; (7) synthesis and electrooptical properties of materials for novel devices.
期刊最新文献
Temperature influence on experimental analog behavior of MISHEMTs A novel method used to prepare PN junction by plasmon generated under pulsed laser irradiation on silicon chip Achieving 15.75% efficiency in solar cells: Advanced surface engineering using Tetra-Tert-Butyl-Tercarbazol-Benzonitrile and organic layer integration in n-type silicon wafer and hybrid Planar-Si systems Influence of Ag-Bi2S3 nanocomposites for highly sensitive and selective Cl2 gas sensors: Synthesis, characterization, and gas sensing performance Editorial Board
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1