A. Tsiara, X. Garros, L. Brunet, P. Batude, C. Fenouillet-Béranger, K. Triantopoulos, M. Cassé, M. Vinet, F. Gaillard, G. Ghibaudo
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Performance and Reliability of a Fully Integrated 3D Sequential Technology
We investigate in detail, for the first time, both performance and reliability of a 3D sequential integration process. It is clearly demonstrated that the top level transistor can be successfully processed at 630°C with almost no impact on the performance and reliability of the bottom level. It is also highlighted that top level devices meet the P&NBTI reliability requirements. Finally an example of successful and robust 3D logic integration is proposed based on a 3D inverter combining a top-level PMOS with a bottom-level NMOS.
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