{"title":"一种用于光学传感器的高温MEMS加热器","authors":"Jing-Yuan Lin, Yu-Sheng Hsieh, Shang-Chian Su","doi":"10.1109/IMPACT.2011.6117255","DOIUrl":null,"url":null,"abstract":"Infrared light source is a key component in the optical sensing systems especially for the Fourier-Transformed Infrared (FTIR) or different kinds of gas sensor system. This paper proposes a novel method for generating a broadband wavelength infrared light source by MEMS heater based on silicon on insulator (SOI) technology. The enhanced long-tern stability has been achieved by a low electrical resistance SOI wafer. This novel MEMS heater can achieve over than 1000 °C. This MEMS heater could be integrated in micro sensing system such as metal oxide semiconductor and Non-dispersive infrared (NDIR) gas sensors.","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"263 1","pages":"451-453"},"PeriodicalIF":0.0000,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A high temperature MEMS heater for optical sensors\",\"authors\":\"Jing-Yuan Lin, Yu-Sheng Hsieh, Shang-Chian Su\",\"doi\":\"10.1109/IMPACT.2011.6117255\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Infrared light source is a key component in the optical sensing systems especially for the Fourier-Transformed Infrared (FTIR) or different kinds of gas sensor system. This paper proposes a novel method for generating a broadband wavelength infrared light source by MEMS heater based on silicon on insulator (SOI) technology. The enhanced long-tern stability has been achieved by a low electrical resistance SOI wafer. This novel MEMS heater can achieve over than 1000 °C. This MEMS heater could be integrated in micro sensing system such as metal oxide semiconductor and Non-dispersive infrared (NDIR) gas sensors.\",\"PeriodicalId\":6360,\"journal\":{\"name\":\"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)\",\"volume\":\"263 1\",\"pages\":\"451-453\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-12-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMPACT.2011.6117255\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMPACT.2011.6117255","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A high temperature MEMS heater for optical sensors
Infrared light source is a key component in the optical sensing systems especially for the Fourier-Transformed Infrared (FTIR) or different kinds of gas sensor system. This paper proposes a novel method for generating a broadband wavelength infrared light source by MEMS heater based on silicon on insulator (SOI) technology. The enhanced long-tern stability has been achieved by a low electrical resistance SOI wafer. This novel MEMS heater can achieve over than 1000 °C. This MEMS heater could be integrated in micro sensing system such as metal oxide semiconductor and Non-dispersive infrared (NDIR) gas sensors.
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