28nm极低k大晶片fcBGA热机械应力分析与优化

M. Hsieh, Chien-Chen Lee, Li Chiun Hung, V. Wang, Harry Perng
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引用次数: 5

摘要

在28nm极低k (ELK)大晶片fcBGA(倒装晶片球栅阵列)热循环测试后,出现了预焊裂纹现象,这可能是由于Cu衬垫层上IMC(金属间化合物)产生的临界应力所致。为了实现28nm ELK大模具fcBGA的热-机械应力分布,本文采用三维有限元分析(FEA)方法对封装几何形状的影响进行了全面研究。采用Taguchi L16(27)方法分析了凸点冶金(UBM)尺寸、阻焊开口(SRO)尺寸、凸点尺寸、热界面材料(TIM)厚度、铜垫直径、衬底厚度及其热膨胀系数(CTE)的影响,找出了最显著的影响因素。通过统计结果发现,UBM尺寸、SRO尺寸和Cu垫块直径对应力响应有显著贡献。利用响应面法(RSM)获取了反映相应应力响应的最重要参数UBM和SRO尺寸比(UBM/SRO)以及Cu垫块直径和SRO尺寸比(pad/SRO)。为了进一步讨论这些重要因素,还举例说明了UBM, SRO和聚酰亚胺(PI)开口尺寸的解剖。仿真结果可为28nm ELK大芯片fcBGA避免临界应力、提高可靠性提供良好的参考和有效的设计指导。
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Thermo-mechanical stress analysis and optimization for 28nm extreme low-k large die fcBGA
The pre-solder crack phenomenon after thermal cycling test is observed in 28nm extreme low-k (ELK) large die fcBGA (flip chip ball grid array), which may come from the resulted critical stresses in IMC (intermetallic compounds) on Cu pad layer. For the purpose of realizing the thermal-mechanical stress distributions in 28nm ELK large die fcBGA, a comprehensive study for the effects of package geometry is investigated by using three-dimensional finite element analyses (FEA) in this paper. The effects of under bump metallurgy (UBM) size, solder resistant opening (SRO) size, solder bump dimension, thermal interface material (TIM) thickness, Cu pad diameter, substrate thickness and its coefficient of thermal expansion (CTE) are discussed by Taguchi L16(27) methodology to figure out the most significant factors. Through the statistical results, it is found that the factors of UBM size, SRO size and Cu pad diameter had significant contributions to stress responses. The most important parameters of UBM and SRO size ratio (UBM/SRO) as well as Cu pad diameter and SRO size ratio (pad/SRO) that comprehend the corresponding stress responses are captured by using response surface methodology (RSM). To have further discussions of these significant factors, dissections for UBM, SRO and polyimide (PI) opening size are also illustrated. The simulated results can be good references and effectively served as design guidelines to avoid the critical stresses as well as enhance the reliability in 28nm ELK large die fcBGA.
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