High-Density and Fault-Tolerant Cu Atom Switch Technology Toward 28nm-node Nonvolatile Programmable Logic

Key device/circuit technologies for realizing a 28nm-node atom switch programmable logic (AS-PL) have been developed. An advanced polymer solid-electrolyte (PSE) reduces set voltage down to 1.6 V while ensuring ON-state and OFF-state reliabilities under current and voltage stress at 125°C. A fine-grain redundancy in a cross-bar array also contributes to reduce supply voltage by 6%. A routing-based wear leveling improves programming cycles by nine times. The developed technologies allow us to design the 28nm-node AS-PL with a 32% higher performance and 11% lower power.