用于轻量化和广角成像应用的柔性衬底上的近短波红外可调谐InGaAs纳米膜光电场效应晶体管

Yida Li, A. Alian, Li Huang, K. Ang, D. Lin, D. Mocuta, N. Collaert, A. Thean
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引用次数: 1

摘要

我们展示了一种InGaAs纳米膜场效应光电晶体管,具有从可见光到近红外光的宽带光谱响应可调性。超薄InGaAs通道(15nm)器件通过InGaAs-on- inp MOSHEMT的外延提升实现,与全曝光通道集成以增强光敏性。在6 V的栅极偏置范围内,光电流可调>5阶。在660 nm至1877 nm的光下测量到380 A/W至15 A/W的导态光响应,比现有的硅和III-V光电探测器[1]-[3]灵敏2倍以上。当弯曲到10厘米半径时,该器件没有性能下降,显示出保形表面传感器应用的适用性。
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A Near- & Short-Wave IR Tunable InGaAs Nanomembrane PhotoFET on Flexible Substrate for Lightweight and Wide-Angle Imaging Applications
We demonstrate an InGaAs nanomembrane field-effect phototransistor with wide-band spectral response tunability, from the visible to near-infrared light. The ultra-thin InGaAs channel (15nm) device, enabled by epitaxial lift-off of InGaAs-on-InP MOSHEMT, is integrated with a fully exposed channel for photosensitivity enhancement. The photocurrent is tunable >5 orders for a gate bias range of 6 V. On-state photo-responsivities of 380 A/W to 15 A/W for 660 nm to 1877 nm light is measured, >2× more sensitive than existing silicon and III-V photodetectors [1]–[3]. The device shows no performance degradation when flexed down to 10-cm radius, showing suitability for conformal surface sensor applications.
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