Ni/SnZn/Cu焊料互连的电迁移行为

X.F. Zhang, J.D. Guo, J. Shang
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引用次数: 0

摘要

研究了Ni/SnZn/Cu焊料互连中的电迁移,平均电流密度为4.1倍104a /cm2,在150℃下持续168.5h。当电子从Ni侧流向Cu侧时,在Ni/SnZn和Cu/SnZn界面处形成了均匀的Ni5Zn21和Cu5Zn8层。其结果与没有电流通过的结果相似。然而,当电子从Cu侧流向Ni侧时,在Ni/SnZn界面处,较厚的Cu6Sn5相取代了Ni5Zn21相,而在Cu/SnZn界面处,较厚的β - cuzn相取代了Cu5Zn8相。同时Cu/SnZn界面也出现Cu- sn相。提出了基于样品中Zn和Cu质量输运的动力学模型来解释金属间化合物在阳极和阴极的生长。
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Electromigration behavior of the Ni/SnZn/Cu solder interconnect
Electromigration in the Ni/SnZn/Cu solder interconnect was studied with an average current density of 4.1times104A/cm2 for 168.5h at 150degC. When the electrons flowed from the Ni side to the Cu side, uniform layers of Ni5Zn21 and Cu5Zn8 were formed at the Ni/SnZn and Cu/SnZn interfaces. The results are similar to those without passage of an electric current. However, upon reversing the current direction where electron flow was from the Cu side to the Ni side, thicker Cu6Sn5 phase replaced Ni5Zn21 phase at the Ni/SnZn interface, whereas at the Cu/SnZn interface, thicker beta-CuZn phase replaced Cu5Zn8 phase. Meanwhile, Cu-Sn phases also appeared at the Cu/SnZn interface. A kinetic model, based on the Zn and Cu mass transport in the sample, was presented to explain the growth of the intermetallic compound at the anode and cathode.
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