考虑热残余应力的混合模界面表征

A. Xiao, G. Schlottig, H. Pape, B. Wunderle, K. Jansen, L. Ernst
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引用次数: 9

摘要

界面分层已成为微电子工业可靠性的关键问题之一,因此受到越来越多的关注。带裂纹的层状结构的分层分析是表征界面韧性的核心。由于界面附近材料力学性能的不匹配以及载荷和几何形状的不对称,裂纹通常在混合模态条件下扩展。本文研究了直接从实际生产过程中获得的环氧成型复合材料-铜引线框架界面的分层韧性测量。因此,试样尺寸相对较小,因此设计和制造了专用的小尺寸测试装置。测试装置允许在单个试样上转移两种分离的载荷(模式I和模式II)。设置是灵活的和可调的测量样品与各种尺寸。为了在各种温度和湿度条件下进行测量,设计了一个特殊的气候室。通过有限元-断裂力学模拟来解释测量结果需要当前的裂纹长度。因此,在测试过程中,使用CCD相机和微变形分析系统(MicroDac)捕获了ldcurrent裂纹长度。通过专门的有限元模型对实验结果进行解释,得到了临界断裂特性。
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Mixed mode interface characterization considering thermal residual stress
Interfacial delamination has become one of the key reliability issues in the microelectronic industry and therefore is getting more and more attention. The analysis of delamination of a laminate structure with a crack along the interface is central to the characterization of interfacial toughness. Due to the mismatch in mechanical properties of the materials adjacent to the interface and also possible asymmetry of loading and geometry, usually the crack propagates under mixed mode conditions. The present study deals with delamination toughness measurements of an epoxy molding compound - copper lead frame interface as directly obtained from a real production process. As a consequence the specimen dimensions are relatively small and therefore a dedicated small-size test set-up was designed and fabricated. The test setup allows transferring two separated loadings (mode I and mode II) on a single specimen. The setup is flexible and adjustable for measuring specimens with various dimensions. For measurements under various temperatures and moisture conditions, a special climate chamber is designed. The ldquocurrent crack lengthrdquo is required for the interpretation of measurement results through FEM-fracture mechanics simulations. Therefore, during testing the ldquocurrent crack lengthrdquo is captured using a CCD camera and a micro deformation analysis system (MicroDac). The critical fracture properties are obtained by interpreting the experimental results through dedicated finite element modeling.
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