S. Kawarabayashi, M. Yokogawa, A. Kawasaki, R. Nakai
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引用次数: 0
Abstract
Comparisons are made between conventional liquid encapsulated Czochralski (LEC), vapor pressure-controlled Czochralski (VCZ) and vertical gradient freeze (VGF) for the growth of InP crystals focusing on size and dislocation density. VCZ seems to be the most promising method for low dislocation density InP crystal growth with a diameter of larger than three inches.<>
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