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Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)最新文献

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Optically-pumped all-epitaxial wafer-fused 1.52-/spl mu/m vertical-cavity lasers 光泵浦全外延晶片熔合1.52-/spl μ m垂直腔激光器
D. Babic, J. J. Dudley, K. Streubel, R. Mirin, E. Hu, J. Bowers
We demonstrate for the first time the operation of all-epitaxial vertical cavity lasers operating at 1.52 /spl mu/m using optical pumping. The laser cavity is formed by bonding an MOCVD-grown InGaAsP/InP mirror to an MBE-grown AlAs/GaAs mirror using the wafer fusion technique. The active region is a bulk 1.55 /spl mu/m InGaAsP layer of thickness 2/spl lambda/. Multiple transverse mode laser operation with equidistant mode separations of 1 nm was observed. The laser structure operated at heat sink temperatures as high as 35/spl deg/C.<>
我们首次利用光泵浦实现了工作在1.52 /spl μ m的全外延垂直腔激光器的工作。利用晶圆融合技术,将mocvd生长的InGaAsP/InP反射镜与mbe生长的AlAs/GaAs反射镜结合形成激光腔。活性区为1.55 /spl mu/m的InGaAsP层,厚度为2/spl lambda/。观察了等距模距为1 nm的多横模激光操作。激光器结构在高达35/spl°c的热沉温度下工作
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引用次数: 1
Integration of tunable DBR-lasers with waveguides for heterodyne receiver OEIC applications using selective area MOVPE 集成可调谐dbr激光器与波导外差接收OEIC应用使用选择性区域MOVPE
R. Kaiser, F. Fidorra, H. Heidrich, P. Albrecht, W. Rehbein, S. Malchow, H. Schroeter-Janssen, D. Franke, G. Sztefka
For the first time we present the integration of a tunable buried four-section DBR-laser butt coupled to a directional coupler based on semi-insulating strip loaded (InGaAsP/InP):Fe waveguides by using selective area epitaxy with large mask areas. Good planarity after the epitaxial regrowth of the waveguide layers has been achieved applying a special preparation of the laser mesa. Average coupling efficiencies of 52% and best values of 63% have been realized. The optical power of the guided light at each output port of the coupler exceeds 1 mW.<>
本文首次提出了一种基于半绝缘条带加载(InGaAsP/InP):Fe波导的可调谐埋置四段dbr激光器对接耦合到定向耦合器的集成方法,该方法采用了具有大掩模面积的选择性区域外延。采用一种特殊的激光平台制备方法,在波导层外延再生后获得了良好的平面度。平均耦合效率为52%,最佳耦合效率为63%。在耦合器的每个输出端口的导光功率超过1mw。
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引用次数: 2
Processing and design techniques for InGaAs/InAlAs/InP photoFETs and MSMs InGaAs/InAlAs/InP光电场效应管和微收发器的加工和设计技术
E. Martín, K. Vaccaro, W. Waters, S. Spaziani, J. P. Lorenzo, G. Robinson
Despite the theoretical advantages of InGaAs/InAlAs/InP photoFETs for electro-optical system applications, fully optimized device structures and processing protocols have yet to be developed. We report here results from several device variations directed toward such optimization. This includes variation of HEMT channel thickness and current density, grading of the hole-blocking InGaAs/InAlAs heterojunction. A novel substrate removal process with backside illumination, and frontside and backside passivation is explored for optimized discrete components as well as integrated devices. Many of these advances are applicable to both MSM photodetectors and photoFETs; results from each are presented.<>
尽管InGaAs/InAlAs/InP光电场效应管在电光系统应用中具有理论上的优势,但完全优化的器件结构和处理协议尚未开发。我们在这里报告了针对这种优化的几种设备变化的结果。这包括HEMT通道厚度和电流密度的变化,洞阻塞InGaAs/InAlAs异质结的分级。针对优化的分立元件和集成器件,探索了一种具有背面照明和正面和背面钝化的新型衬底去除工艺。许多这些进步都适用于MSM光电探测器和光电场效应管;给出了各自的结果。
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引用次数: 1
Conductance transient characterization of reactive ion etched HEMT gate recesses 反应离子蚀刻HEMT栅极凹槽的电导瞬态特性
J. Schramm, M. Mondry, E. Hu, J. Merz
A simple, novel technique was devised to examine the effects of RIE self-bias voltage, plasma exposure time, and oxygen plasma clean conditions on the AlInAs Schottky contact layer of an InP-based HEMT.<>
设计了一种简单的新技术来检测RIE自偏置电压、等离子体暴露时间和氧等离子体清洁条件对inp基HEMT的AlInAs Schottky接触层的影响。
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引用次数: 0
Determination of the noise source parameters in AlInAs/GaInAs HEMT heterostructures based on measured noise temperature dependence on the electric field 基于实测噪声温度对电场依赖性的AlInAs/GaInAs HEMT异质结构噪声源参数的确定
C. Bergamaschi, W. Patrick, W. Baechtold
The noise temperature dependence on the electric field in an AlInAs/GaInAs HEMT heterostructure has been measured. It was found that the dependence of the noise temperature on the electric field in GaAs MESFETs and in AlInAs/GaInAs HEMTs are remarkably different. For this reason a different model must be used for AlInAs/GaInAs HEMTs. Based on the measured noise temperature dependence on the electric field, am analytic noise model for the AlInAs/GaInAs HEMT has been developed. The noise source parameters were calculated and compared with extracted noise source parameters from noise measurements.<>
测量了AlInAs/GaInAs HEMT异质结构中噪声温度对电场的依赖关系。结果表明,在GaAs mesfet和AlInAs/GaInAs hemt中,噪声温度对电场的依赖性明显不同。因此,必须为AlInAs/GaInAs hemt使用不同的模型。基于实测噪声温度与电场的关系,建立了AlInAs/GaInAs HEMT的解析噪声模型。计算噪声源参数,并与噪声测量中提取的噪声源参数进行比较
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引用次数: 5
Very rapid and selective epitaxy of InP around mesas of height up to 14 /spl mu/m by hydride vapour phase epitaxy 利用氢化物气相外延技术在高度高达14 /spl mu/m的平台周围快速选择性地外延InP
S. Lourdudoss, K. Streubel, J. Wallin, J. André, O. Kjebon, G. Landgren
Selective growth of InP and related materials on patterned planar and non-planar substrates is one of the key steps in the fabrication of discrete and integrated optoelectronic devices. Growth of current blocking InP layers around the edge emitting laser (EEL) mesas are successfully used in many laboratories. In recent years, not only quantum wells have replaced the bulk active layers in the laser structures, but also, more and more advanced optoelectronic component structures continue to emerge; besides, ever since the successful demonstration of electrically pumped long wavelength vertical cavity surface emitting lasers (VCSEL) at low temperatures, there is an increasing urge to demonstrate it at room temperature. Both these situations set special demands on the selective regrowth of semi-insulating InP:Fe around mesas for current confinement, namely, a) the regrowth has to be rapid enough to avoid excessive quantum well mixing and unwanted dopant diffusion and b) it has to be successful even if the mesas are /spl sim/10 /spl mu/m high as in the case of VCSEL mesas. The purpose of this paper is to address these two points. Hydride Vapour Phase Epitaxy (HVPE) is best suited for the purpose owing to its selectivity, planarity and high growth rate. After successful regrowth of current blocking InP by HVPE for fabricating three types of edge emitting lasers (EEL) such as Fabry-Perot(FP), Distributed Feed Back (DFB) and Distributed Bragg Reflector (DBR) lasers, we have extended our studies to the regrowth of InP around cylindrical and cuboidal mesas of height up to 14 /spl mu/m with the intention of fabricating electrically pumped VCSEL. To the knowledge of the authors, such studies have not been reported. Here we present a comparison of the regrowth aspects in EEL and VCSEL cases. We also present a summary of certain device results of EEL fabricated by incorporating this technique.<>
在平面和非平面基底上选择性生长InP和相关材料是制造分立和集成光电器件的关键步骤之一。在边缘发射激光器(EEL)平台周围生长阻挡电流的InP层已成功地应用于许多实验室。近年来,量子阱不仅取代了激光结构中的本体有源层,而且越来越多先进的光电元件结构不断涌现;此外,自从在低温下成功地展示了电泵长波垂直腔面发射激光器(VCSEL)以来,在室温下展示它的愿望越来越强烈。这两种情况都对半绝缘InP:Fe在台子周围的选择性再生提出了特殊的要求,即:a)再生必须足够快,以避免过度的量子阱混合和不必要的掺杂扩散;b)即使台子高为/spl sim/10 /spl mu/m(如VCSEL台子),再生也必须成功。本文的目的就是要解决这两点。氢化物气相外延(HVPE)由于其选择性、平面性和高生长速率而最适合用于这一目的。在HVPE成功再生电流阻断InP用于制造三种类型的边缘发射激光器(EEL),如Fabry-Perot(FP),分布式反馈(DFB)和分布式布拉格反射器(DBR)激光器之后,我们将研究扩展到高度高达14 /spl mu/m的圆柱形和立方体平台周围的InP再生,意图制造电泵浦VCSEL。据作者所知,此类研究尚未被报道。在这里,我们比较了EEL和VCSEL病例的再生方面。我们还总结了采用该技术制备的电鳗的某些器件结果
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引用次数: 4
Eight-channel p-i-n/HBT monolithic receiver array at 2.5 Gb/s per channel for WDM applications 8通道p-i-n/HBT单片接收机阵列,每通道2.5 Gb/s,用于WDM应用
S. Chandrasekhar, L. Lunardi, R. Hamm, G. Qua
We report a monolithic chip incorporating an eight channel p-i-n/HBT photoreceiver array designed for multi-channel WDM applications. The p-i-n photodetectors are edge illuminated and centered at the right distance for mating with either ribbon fiber connectors or waveguide demultiplexers. Each channel operates at 2.5 Gb/s with an electrical cross talk of -20 dB between adjacent channels. The average sensitivity of each receiver in the array was measured to be (-20/spl plusmn/1) dBm for a bit error rate of 10/sup -9/ at a wavelength of 1.5 /spl mu/m.<>
我们报道了一种集成八通道p-i-n/HBT光接收器阵列的单片芯片,设计用于多通道波分复用应用。p-i-n光电探测器是边缘照明的,并以适当的距离为中心与带状光纤连接器或波导解复用器配对。每个通道以2.5 Gb/s的速度运行,相邻通道之间的电串扰为-20 dB。在波长为1.5 /spl mu/m时,在误码率为10/sup -9/的情况下,阵列中每个接收机的平均灵敏度为(-20/spl plusmn/1) dBm。
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引用次数: 4
Effective first layer antireflective coating on InP solar cells grown by chemical oxidation 化学氧化法制备InP太阳能电池的有效第一层抗反射涂层
M. Faur, M. Faur, D. Flood, D. Brinker, C. Goradia, S. Bailey, I. Weinberg, M. Goradia, D. Jayne, J. Moulot, N. Fatemi
Commonly used first layer antireflection (AR) coatings for InP solar cells, such as ZnS, Sb/sub 2/O/sub 3/, SiO/sub 2/ and SiO, deposited either by electron-beam or by resistive evaporation, destroy the stoichiometry of the emitter surface. Consequently, the surface recombination velocity (SRV) at the emitter surface is significantly increased, leading to a reduction in the values of solar cell performance parameters. This can be prevented by growing, after contacting, a thin native oxide layer on the emitter surface. Best results are obtained using a phosphorus-rich chemical oxide grown by chemical oxidation using a newly developed etchant (PNP) based on HNO/sub 3/, o-H/sub 3/PO/sub 4/ and H/sub 2/O/sub 2/. The chemical oxide grown on p/sup +/-InP emitters, using the PNP etchant, passivates the surface and can be used as a first layer AR coating.<>
通常用于InP太阳能电池的第一层增透(AR)涂层,如ZnS、Sb/sub 2/O/sub 3/、SiO/sub 2/和SiO,通过电子束或电阻蒸发沉积,破坏了发射极表面的化学计量。因此,发射极表面的表面复合速度(SRV)显著增加,导致太阳能电池性能参数值降低。这可以通过在接触后在发射极表面生长薄的天然氧化层来防止。采用基于HNO/sub 3/、O -H/sub 3/PO/sub 4/和H/sub 2/O/sub 2/的新型蚀刻剂(PNP)进行化学氧化,获得了最佳的富磷化学氧化物。化学氧化物生长在p/sup +/-InP发射器上,使用PNP腐蚀剂,使表面钝化,可用作第一层AR涂层。
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引用次数: 5
In situ mass spectrometric diagnostics during InP deposition in a remote plasma-enhanced MOCVD system 远程等离子体增强MOCVD系统中InP沉积的原位质谱诊断
G. Bruno, M. Losurdo, G. Cicala, P. Capezzuto
In conventional MOCVD systems, high deposition temperatures are needed to supply the activation energy for both gas phase and surface reactions, and to produce epitaxial growth material with good morphology. Recently, there has been an increased interest on the use of the plasma, in remote configuration, to enhance the MOCVD process for the growth of III-V materials (1). The plasma, as a secondary source of energy, offers low temperature and low V/III ratio processing, mainly by the pre-cracking of the thermally relatively stable hydrides PHQ or AsH/sub 3/. Remote plasma processes are also receiving increased attention for other applications such as: (a) the substrate cleaning, for the removal of native oxides on InP and GaAs surface by hydrogen plasma treatment (2,3), and (b) the in situ generation of PHQ through the ablation of red-phosphorus in H/sub 2/ plasma (4,5). These RPE-MOCVD processes can operate in a wide range of parameters (pressure, r.f. power, gas flow, geometry, frequency, temperature) and the knowledge and understanding of the plasma chemistry controlling the production of reactive species are still far from being complete. In this work we present our first observations on a laboratory RPE-MOCVD reactor for the deposition of InP from PHQ and InMe/sub 3/. Mass spectrometry (MS) was used to investigate the in situ production of PH/sub 3/, the plasma pre-cracking of PH/sub 3/ and the InP growth process. The optical emission spectroscopy (OES) was also used for the analysis of the emitting species present in the plasma phase.<>
在传统的MOCVD系统中,需要较高的沉积温度来为气相和表面反应提供活化能,并生产出具有良好形貌的外延生长材料。最近,人们对使用等离子体在远程配置中增强MOCVD工艺以生长III-V材料的兴趣越来越大(1)。等离子体作为次要能量来源,主要通过预裂解热相对稳定的氢化物PHQ或AsH/sub 3/来提供低温和低V/III比的处理。远程等离子体工艺在其他应用中也受到越来越多的关注,例如:(a)基材清洁,通过氢等离子体处理去除InP和GaAs表面的天然氧化物(2,3),以及(b)通过H/sub /等离子体中红磷的烧蚀原位生成PHQ(4,5)。这些RPE-MOCVD工艺可以在很宽的参数范围内运行(压力、射频功率、气体流量、几何形状、频率、温度),而控制反应物质产生的等离子体化学知识和理解仍远未完成。在这项工作中,我们首次在实验室RPE-MOCVD反应器上观察到PHQ和InMe/ sub3 / InP的沉积。采用质谱法(MS)研究了PH/sub - 3/的原位生成、PH/sub - 3/的等离子体预裂解和InP的生长过程。光学发射光谱(OES)也用于分析等离子体相中存在的发射物质。
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引用次数: 0
A review of radiation effects in InP solar cells InP太阳能电池辐射效应研究进展
R. Walters
Theoretically, InP has one of the highest solar energy conversion efficiencies of any semiconductor material. However, InP wafers are brittle and expensive which makes large area, single crystal InP device fabrication difficult. Despite this difficulty, research in InP solar cells has progressed rapidly over the past 10 years. The reason is high radiation tolerance. This quality is an essential feature of space power sources due to the harsh space radiation environment, and InP solar cells are more radiation resistant than the leading solar cell technologies, i.e. Si and GaAs. Therefore, InP solar cells are a very attractive space power source and have been seriously developed as such. This paper first reviews the chronology of this development and then takes a focused look at the present understanding of the mechanism of the radiation response of InP solar cells.<>
理论上,InP是所有半导体材料中太阳能转换效率最高的材料之一。然而,InP晶圆易碎且价格昂贵,这使得制造大面积单晶InP器件变得困难。尽管存在这些困难,但在过去的10年里,InP太阳能电池的研究取得了迅速的进展。原因是高辐射耐受性。由于恶劣的空间辐射环境,这种质量是空间电源的基本特征,而InP太阳能电池比领先的太阳能电池技术(即Si和GaAs)更具抗辐射性。因此,InP太阳能电池是一种非常有吸引力的空间电源,并得到了认真的发展。本文首先回顾了这一发展的年代,然后重点介绍了目前对InP太阳能电池辐射响应机制的理解
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引用次数: 8
期刊
Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)
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