Improvement on the Property of TiO2 Films due to Plasma Processing

H. Murata, T. Sakamaki, A. Yoshizawa, M. Uwatoko, S. Kogoshi
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Abstract

TiO2 films are known to be effective as a photo-catalyst for abatement of NOx and volatile organic compounds. However, they can't normally be activated with visible rays. The TiO2 films have been processed by hydrogen or nitrogen plasma in order to absorb some of visible rays. The abatement experiments of NOx and HCHO using the TiO2 films were carried out. The results showed that the reduction rate of NOx by the hydrogen plasma processed TiO2 film was higher than that of the nitrogen plasma processed one by 1.1 times and that of no processed one by 1.7 times when using a chemical lamp and by more than 10 times when using an ordinary fluorescent lamp, which suggests that the plasma processed TiO 2 films are activated with visible rays
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等离子体处理对TiO2薄膜性能的改善
众所周知,TiO2薄膜是一种有效的光催化剂,用于减少氮氧化物和挥发性有机化合物。然而,它们通常不能被可见光激活。二氧化钛薄膜经氢或氮等离子体处理,以吸收部分可见光。利用TiO2薄膜进行了NOx和HCHO的减排实验。结果表明,在化学灯下,氢等离子体处理TiO2膜对NOx的还原率比氮等离子体处理TiO2膜的还原率高1.1倍,比未处理TiO2膜的还原率高1.7倍,比普通荧光灯下的还原率高10倍以上,说明等离子体处理TiO2膜是被可见光激活的
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