An electrostatically excited 2D-micro-scanning-mirror with an in-plane configuration of the driving electrodes

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838563

H. Schenk, P. Durr, D. Kunze, H. Lakner, H. Kuck

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引用次数: 42

Abstract

A novel resonantly excited 2D-Micro-Scanning-Mirror is presented which makes use of an electrostatic driving principle allowing to locate the driving electrodes in the chip plane. The mechanical elements and the mirror plate consist of a 30 /spl mu/m thick single crystal silicon layer. The mirror plate is suspended by a gimbal mounting and can therefore be deflected along two axes. It is shown that a special isolation technique is suitable to separate the electrical potentials on the movable elements and therefore allows to excite the two oscillations independently. The isolation technique is based on the oxidation and polysilicon filling of 1 /spl mu/m wide trenches in the 30 /spl mu/m thick layer of silicon. The influence of the surrounding gas on the coupling of the oscillations is examined. No significant influence is observed. The performance of the novel 2D-Micro-Scanning-Mirror is demonstrated by the generation of various Lissajous patterns by the reflected laser beam. Frequency ratios of 1:1 up to 13:1 are obtained with the presented devices.

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一种具有平面内驱动电极结构的静电激励二维微扫描镜

提出了一种利用静电驱动原理在芯片平面上定位驱动电极的新型共振激励二维微扫描镜。机械元件和镜板由30 /spl μ m厚的单晶硅层组成。镜板悬挂在一个万向节安装，因此可以沿两个轴偏转。结果表明，采用一种特殊的隔离技术可以分离可动元件上的电位，从而可以独立地激发两种振荡。该隔离技术是基于在30 /spl mu/m厚的硅层中氧化和填充1 /spl mu/m宽的沟槽。研究了周围气体对振荡耦合的影响。没有观察到显著的影响。新型二维微扫描镜的性能通过反射激光束产生各种利萨焦图案来证明。频率比为1:1至13:1与所提出的设备。

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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