Improvement of Radiation Characteristics of a 300-GHz On-Chip Patch Antenna with Epoxy Mold Compound (EMC) Encapsulation

H. Bakshi, R. Murugan, Sylvester Ankamah-Kusi
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Abstract

Radiation characteristics of on-chip patch antennas are limited by the metallization and dielectric properties of the back-end of line (BEOL) silicon manufacturing processes. A 300-GHz on-chip patch antenna is designed using a radio frequency (RF) complementary metal-oxide-semiconductor (CMOS) process. The radiation efficiency, peak gain, and impedance bandwidth improve upon encapsulation of the antenna with IC packaging epoxy mold compounds (EMCs). In addition, high-frequency conduction and dielectric losses are analyzed, and their effects on antenna radiation efficiency are quantified in this paper. The overall radiation efficiency is shown to improve by 25%, peak gain by $\sim 3 \ \boldsymbol{\text{dB}}$, and the-10-dB return loss bandwidth improves from 3 GHz to 18 GHz by encapsulating a 300-GHz on-chip patch antenna within commercially available EMCs.
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采用环氧模复合材料(EMC)封装改善300ghz片上贴片天线的辐射特性
片上贴片天线的辐射特性受到线后端(BEOL)硅制造工艺的金属化和介电特性的限制。采用射频(RF)互补金属氧化物半导体(CMOS)工艺设计了300ghz片上贴片天线。采用IC封装环氧模化合物(EMCs)封装天线,提高了天线的辐射效率、峰值增益和阻抗带宽。此外,本文还分析了高频传导损耗和介质损耗,并量化了它们对天线辐射效率的影响。总体辐射效率提高了25%,峰值增益提高了25%,并且通过在商用emc中封装300 GHz片上贴片天线,将10db回波损耗带宽从3 GHz提高到18 GHz。
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