Yield considerations in the choice of 3D technology

G. Smith, L. Smith, S. Hosali, S. Arkalgud
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引用次数: 49

Abstract

Die-to-wafer (DtW) stacking offers a yield advantage over wafer-to-wafer (WtW) and system-on-a-chip (SoC) if testing can identify good die and reduce stacking of good and bad die pairs. In this study, an SoC is broken into two equal areas to form a 3D system, and best case yields of DtW and WtW is compared. Testing need not be perfect to realize significant yield advantage with DtW.
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选择3D技术时的良率考虑
如果测试可以识别好的芯片并减少好的和坏的芯片对的堆叠,那么晶圆到晶圆(DtW)堆叠提供了优于晶圆到晶圆(WtW)和片上系统(SoC)的良率优势。在本研究中,将SoC分成两个相等的区域形成三维系统,并比较了DtW和WtW的最佳产率。测试不需要完美,就可以实现DtW的显著良率优势。
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A statistical method for the characterization of bimodal electromigration distributions Contamination control of particles smaller than 40 nm by thermophoretic force Yield considerations in the choice of 3D technology Evolutionary business models and inter-firm engineering processes between the foundry and fabless in the semiconductor industry Systematic classification from the functional view in the check items for equipment quality assurance upon installation
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