High dose efficiency, ultra-high resolution amorphous selenium/CMOS hybrid digital X-ray imager

Abstract

We demonstrate measured X-ray dose efficiency results from a 5.6-μm × 6.25-μm pixel-pitch direct-conversion amorphous selenium/CMOS hybrid X-ray imager. Compared to existing scintillator-based imagers, our approach enables up to 100× gains in DQE at spatial frequencies of 20-60 cycles/mm, which could radically accelerate bioengineering research. The measured MTF is 50% at 32 cycles/mm, corresponding to a 16-μm effective object size. We also demonstrate a MTF model which confirms experimental results with an RMS error of 0.02.