A CMOS z-axis capacitive accelerometer with comb-finger sensing

Huikai Xie, G. Fedder
{"title":"A CMOS z-axis capacitive accelerometer with comb-finger sensing","authors":"Huikai Xie, G. Fedder","doi":"10.1109/MEMSYS.2000.838567","DOIUrl":null,"url":null,"abstract":"This paper reports the first design and experimental results of a z-axis accelerometer that utilizes the sidewall capacitance change of multi-conductor comb fingers. The accelerometer has a fully differential capacitive bridge interface and its fabrication is compatible with standard CMOS processes. The frequency response of the accelerometer is characterized both electrically and optically and about 9.3 kHz resonant frequency is measured, which matches MEMCAD simulation within 15%. Measured sensitivity is 0.5 mV/g with less than -40 dB cross-axis sensitivity, noise floor 6 mg/rtHz, and linear range from -27 g to 27 g.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"83","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2000.838567","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 83

Abstract

This paper reports the first design and experimental results of a z-axis accelerometer that utilizes the sidewall capacitance change of multi-conductor comb fingers. The accelerometer has a fully differential capacitive bridge interface and its fabrication is compatible with standard CMOS processes. The frequency response of the accelerometer is characterized both electrically and optically and about 9.3 kHz resonant frequency is measured, which matches MEMCAD simulation within 15%. Measured sensitivity is 0.5 mV/g with less than -40 dB cross-axis sensitivity, noise floor 6 mg/rtHz, and linear range from -27 g to 27 g.
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一种带梳状手指感应的CMOS z轴电容式加速度计
本文报道了一种利用多导体梳状指侧壁电容变化的z轴加速度计的初步设计和实验结果。加速度计具有全差分电容式桥接口,其制造与标准CMOS工艺兼容。从电学和光学两个方面对加速度计的频率响应进行了表征,测量到的谐振频率约为9.3 kHz,与MEMCAD仿真结果的匹配度在15%以内。测量灵敏度为0.5 mV/g,交叉轴灵敏度小于-40 dB,本底噪声为6 mg/rtHz,线性范围为-27 g至27 g。
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