{"title":"In-situ monitoring and control for the growth of highly reproducible VCSEL structures","authors":"Y. Houng, M. Tan, B. Liang, S. Wang, D. Mars","doi":"10.1109/ICIPRM.1994.328308","DOIUrl":null,"url":null,"abstract":"Summary form only given. This paper reviews the pyrometric interferometry technique, and compares it with other in-situ and ex-situ methods for epitaxial growth monitoring and control. Highly reproducible vertical cavity surface emitting lasers (VCSEL) structures are used as an example to demonstrate the effectiveness of the in-situ monitoring and control technique. The authors use the pyrometric interferometry technique for in-situ monitoring and feedback control of layer thickness to obtain highly reproducible distributed Bragg reflectors (DBR) for 980- and 780-nm vertical cavity surface emitting lasers (VCSEL).<<ETX>>","PeriodicalId":161711,"journal":{"name":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.1994.328308","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Summary form only given. This paper reviews the pyrometric interferometry technique, and compares it with other in-situ and ex-situ methods for epitaxial growth monitoring and control. Highly reproducible vertical cavity surface emitting lasers (VCSEL) structures are used as an example to demonstrate the effectiveness of the in-situ monitoring and control technique. The authors use the pyrometric interferometry technique for in-situ monitoring and feedback control of layer thickness to obtain highly reproducible distributed Bragg reflectors (DBR) for 980- and 780-nm vertical cavity surface emitting lasers (VCSEL).<>
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