A one-chip scanning retina with an integrated micro-mechanical scanning actuator for a compound eye visual sensor

Abstract

A micro-sensor that merges sensing and scanning functions on a single-chip has been designed and fabricated, resulting in the successful design of the first integrated scanning retina of its kind. A microfabrication technique has been developed in order to combine a microlens array together with a photodiode array and an electrostatically driven scanning slit on a single chip. The movement of the electrostatic scanner generates an effect similar to that of "retinal scanning vergence" found in the insects' compound eyes. With the fully integrated silicon scanning retina with a micro-mechanical scanner, we propose a new architecture of Retinal Scanning which enhances the resolution of a visual sensor.