Structural and electrical characteristics of undoped LEC GaAs crystals grown from slightly Ga-rich melts: a new approach

J. Weyher, C. Frigeri, L. Zanotti, H. Alt, P. van der Wel, P. Gail
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Abstract

Undoped GaAs crystals were grown by LEC method from Ga-rich melts with the initial composition above the critical value for transition from S.I. to p-type material. The typical resistivity values measured on these crystals were: 5x10/sup 7/ ohm-cm (seed part) and 6x10/sup 5/ ohm.cm (main body). Samples with these different characteristics were subjected to detailed studies including DSL photoetching, TEM, SRPL, LST and IR absorption. Remarkable differences were found between the high and low resistivity parts of the ingots relating to structural and optical properties. A model is presented based on the concept of the temperature-time-transformation (TTT) diagram, which explains the solid-state phase transitions. Seemingly conflicting results about the increasing EL2 concentration along the ingot axis are explained in terms of competition between formation of EL2 and arsenic precipitates. The present results indicate that the position of the congruent melting point is on the As-rich side of the phase diagram.
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微富ga熔体生长未掺杂LEC GaAs晶体的结构和电学特性:一种新方法
用LEC法从富ga熔体中生长出未掺杂的GaAs晶体,初始成分高于si型向p型材料过渡的临界值。在这些晶体上测量的典型电阻率值为:5x10/sup 7/欧姆-厘米(种子部分)和6x10/sup 5/欧姆。Cm(主体)。对具有这些不同特性的样品进行了详细的研究,包括DSL光刻,TEM, SRPL, LST和IR吸收。钢锭的高电阻率部分和低电阻率部分在结构和光学性能方面存在显著差异。基于温度-时间相变(TTT)图的概念,提出了一个解释固态相变的模型。关于沿铸锭轴EL2浓度增加的看似矛盾的结果可以用EL2和砷沉淀形成之间的竞争来解释。结果表明,同熔点位于相图的富砷一侧。
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