A. Koide, Y. Sasaki, Y. Yoshimura, R. Miyake, T. Terayama
{"title":"Micromachined dispenser with high flow rate and high resolution","authors":"A. Koide, Y. Sasaki, Y. Yoshimura, R. Miyake, T. Terayama","doi":"10.1109/MEMSYS.2000.838555","DOIUrl":null,"url":null,"abstract":"A micromachined dispenser with a high flow rate and high resolution for chemical analysis is described. The flow rate as a function of the actuation frequency increases linearly up to a frequency of 700 Hz with a final value of about 148 /spl mu/l/s using water as a pump medium. The dispensing accuracy is better than 1% (coefficient of variance) at a dispensing volume of 56 /spl mu/l. This dispenser shows good dispensing performance thanks to its precise valve structure and surface-treated nozzle.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"134 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2000.838555","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
A micromachined dispenser with a high flow rate and high resolution for chemical analysis is described. The flow rate as a function of the actuation frequency increases linearly up to a frequency of 700 Hz with a final value of about 148 /spl mu/l/s using water as a pump medium. The dispensing accuracy is better than 1% (coefficient of variance) at a dispensing volume of 56 /spl mu/l. This dispenser shows good dispensing performance thanks to its precise valve structure and surface-treated nozzle.
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