N. Kaou, V. Armbruster, J. Jeannot, P. Mollier, H. Porte, N. Devoldère, M. de Labachelerie
{"title":"Microconnectors for the passive alignment of optical waveguides and ribbon optical fibers","authors":"N. Kaou, V. Armbruster, J. Jeannot, P. Mollier, H. Porte, N. Devoldère, M. de Labachelerie","doi":"10.1109/MEMSYS.2000.838602","DOIUrl":null,"url":null,"abstract":"This paper describes the fabrication of a new mechanical microconnector, which is used for the precise optical self-alignment of multi-waveguide Optical Integrated Circuits (OIC) to ribbon optical fibers, without injecting light in the fiber. Nickel alignment pins are electrodeposited on the OIC using a photolithographic process, and the pins are inserted into suitable openings made on a silicon micromachined platform, on which optical fibers are accurately positioned using V-grooves. Design and fabrication issues are reported, as well as preliminary experimental results which show that excess optical losses on the order of 3 dB can be obtained.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"9 20","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2000.838602","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
This paper describes the fabrication of a new mechanical microconnector, which is used for the precise optical self-alignment of multi-waveguide Optical Integrated Circuits (OIC) to ribbon optical fibers, without injecting light in the fiber. Nickel alignment pins are electrodeposited on the OIC using a photolithographic process, and the pins are inserted into suitable openings made on a silicon micromachined platform, on which optical fibers are accurately positioned using V-grooves. Design and fabrication issues are reported, as well as preliminary experimental results which show that excess optical losses on the order of 3 dB can be obtained.