K. Joshi, D. Nminibapiel, M. Ghoneim, D. Ali, R. Ramamurthy, L. Pantisano, I. Meric, S. Ramey
{"title":"A detailed comparison of various off-state breakdown methodologies for scaled Tri-gate technologies","authors":"K. Joshi, D. Nminibapiel, M. Ghoneim, D. Ali, R. Ramamurthy, L. Pantisano, I. Meric, S. Ramey","doi":"10.1109/IRPS48203.2023.10117954","DOIUrl":null,"url":null,"abstract":"The source-drain punch-through current in off-state TDDB stress (OSS) is shown to significantly affect off-state breakdown behavior. This paper compares various OSS methodologies available in the literature and discusses how source-to-drain punch-through affects off-state breakdown and reliability. The proposed Drain-stress with Offset (DSO) OSS methodology limits punch-through to better reflect the actual field dependence of OSS breakdown for scaled tri-gate MOSFET technologies.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"44 8","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE International Reliability Physics Symposium (IRPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS48203.2023.10117954","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The source-drain punch-through current in off-state TDDB stress (OSS) is shown to significantly affect off-state breakdown behavior. This paper compares various OSS methodologies available in the literature and discusses how source-to-drain punch-through affects off-state breakdown and reliability. The proposed Drain-stress with Offset (DSO) OSS methodology limits punch-through to better reflect the actual field dependence of OSS breakdown for scaled tri-gate MOSFET technologies.