A detailed comparison of various off-state breakdown methodologies for scaled Tri-gate technologies

K. Joshi, D. Nminibapiel, M. Ghoneim, D. Ali, R. Ramamurthy, L. Pantisano, I. Meric, S. Ramey
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Abstract

The source-drain punch-through current in off-state TDDB stress (OSS) is shown to significantly affect off-state breakdown behavior. This paper compares various OSS methodologies available in the literature and discusses how source-to-drain punch-through affects off-state breakdown and reliability. The proposed Drain-stress with Offset (DSO) OSS methodology limits punch-through to better reflect the actual field dependence of OSS breakdown for scaled tri-gate MOSFET technologies.
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三栅极技术的各种非状态击穿方法的详细比较
失态TDDB应力(OSS)下的源漏击穿电流对失态击穿行为有显著影响。本文比较了文献中可用的各种OSS方法,并讨论了源-漏穿孔如何影响非状态击穿和可靠性。提出的漏极应力与偏置(DSO) OSS方法限制了穿通,以更好地反映缩放三栅极MOSFET技术中OSS击穿的实际场依赖性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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