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2023 IEEE International Reliability Physics Symposium (IRPS)最新文献

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Comprehensive Analysis of Hole-Trapping in SiN Films with a Wide Range of Time Constants Based on Dynamic C-V 基于动态C-V的大时间常数SiN薄膜空穴捕获综合分析
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118083
Harumi Seki, R. Ichihara, Y. Higashi, Y. Nakasaki, M. Saitoh, Masamichi Suzuki
The charge trapping characteristics in the silicon nitride (SiN) film were comprehensively studied by using dynamic CV technique with charge centroid analysis under various temperatures. We found two types of hole traps with short (long) time constant which capture holes at low (high) electric field. Traps with time constant down to 10 $mu mathrm{s}$ can be detected thanks to dynamic CV. For each kind of traps, the trapped charge density, spatial position, and the activation energy of de-trapping process are clarified, which are essential to understand the reliability issues of charge-trap memory devices.
采用动态CV技术和电荷质心分析方法,对氮化硅薄膜在不同温度下的电荷俘获特性进行了全面研究。我们发现了两种时间常数短(长)的空穴阱,它们可以捕获低(高)电场下的空穴。由于动态CV,可以检测到时间常数低至10 $mu mathrm{s}$的陷阱。对于每一种陷阱,明确了捕获的电荷密度、空间位置和释放过程的活化能,这对理解电荷陷阱存储器件的可靠性问题至关重要。
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引用次数: 0
High Temperature and High Humidity Reliability Evaluation of Large-Area 1200V and 1700V SiC Diodes 1200V和1700V大面积SiC二极管高温高湿可靠性评估
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118095
I. Ji, A. Mathew, Jae-Hyung Park, Neal Oldham, Matthew McCain, S. Sabri, E. Brunt, B. Hull, D. Lichtenwalner, D. Gajewski, J. Palmour
For high power full SiC modules, the application requires highly reliable and robust 4H-SiC diodes in parallel with SiC MOSFETs. This work introduces new large size (50A rated) 1200V and 1700V 4H-SiC diodes which exhibit excellent performance under high temperature reverse bias (HTRB) and high voltage high temperature humidity (HV -H3TRB) conditions without sacrificing critical device performance such as forward voltage dropr $mathbf{(Vf)}$, Schottky Barrier height and ideality factor, and reverse leakage current. In this work, we have improved the device integration scheme for diode manufacturing, which enabled the successful completion of HTRB and HV-H3TRB qualification for automotive application.
对于高功率全SiC模块,应用需要高可靠性和鲁棒的4H-SiC二极管与SiC mosfet并行。这项工作引入了新的大尺寸(50A额定)1200V和1700V 4H-SiC二极管,在高温反向偏置(HTRB)和高压高温高湿(HV -H3TRB)条件下表现优异,而不牺牲器件的关键性能,如正向电压降$mathbf{(Vf)}$,肖特基势垒高度和理想因数,以及反向漏电流。在这项工作中,我们改进了二极管制造的器件集成方案,使HTRB和HV-H3TRB的汽车应用资格顺利完成。
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引用次数: 1
Performing Machine Learning Based Outlier Detection for Automotive Grade Products 基于机器学习的汽车级产品离群点检测
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118207
Y. L. Yang, P. Tsao, C. W. Lin, Ross Lee, Olivia Ni, T. T. Chen, Y. Ting, C. Lai, Jason Yeh, Arnold Yang, Wayne Huang, Peng Chen, Charly Tsai, Ryan Yang, Y. S. Huang, B. Hsu, M. Z. Lee, T. Lee, Michael Huang, Coming Chen, L. Chu, H. Kao, N. S. Tsai
Near-zero defective parts per million (DPPM) and returned material authorization (RMA) from customers is the goal pursued by many companies. In this paper, a machine learning based method is proposed to detect outliers in the final test stage using the XGBoost algorithm and the Mahalanobis distance. We captured the weak integrated circuits (ICs) that passed the final test but failed in the system level test (SLT) or the verification of quality engineering aging (QEA). Compared to the random sampling, the experiments showed we could recognize 2x~3x weak IC ratio in the SLT and >10x in the QEA to achieve automotive grade DPPM.
接近零的次品率(DPPM)和客户的退货授权(RMA)是许多公司追求的目标。本文提出了一种基于机器学习的方法,利用XGBoost算法和马氏距离来检测最终测试阶段的异常值。我们捕获了通过最终测试但未通过系统级测试(SLT)或质量工程老化验证(QEA)的弱集成电路(ic)。与随机抽样相比,我们可以在SLT中识别出2x~3x的弱集成电路比,在QEA中识别出>10x的弱集成电路比,从而实现汽车级DPPM。
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引用次数: 0
Effects of Collected Charge and Drain Area on SE Response of SRAMs at the 5-nm FinFET Node 收集电荷和漏极面积对sram在5nm FinFET节点上SE响应的影响
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118115
N. J. Pieper, Y. Xiong, D. Ball, J. Pasternak, B. Bhuva
Single-port (SP) and two-port (TP) SRAM exposure to low-energy protons, alpha particles, and heavy-ions with varying supply voltages show particle linear energy transfer (LET) values and circuit design strongly influence charge collection, and subsequently SE cross-sections. Critical charge is not the dominant determinant of SE cross-section at the 5-nm node for all environments.
单端口(SP)和双端口(TP) SRAM暴露于低能质子、α粒子和不同电源电压的重离子下,显示粒子线性能量转移(LET)值和电路设计强烈影响电荷收集,随后影响SE横截面。在所有环境下,临界电荷都不是5nm节点SE截面的主要决定因素。
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引用次数: 0
The Role of Mobility Degradation in the BTI-Induced RO Aging in a 28-nm Bulk CMOS Technology: (Student paper) 迁移率退化在28纳米块体CMOS技术中bti诱导的RO老化中的作用:(学生论文)
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118026
D. Sangani, J. Diaz-Fortuny, E. Bury, B. Kaczer, G. Gielen
Shrinking reliability margins have created an increasing demand for circuit aging simulations, which enable product reliability assessment pre-production. Physical Design Kits (PDKs) of modern technologies have started to include compact models for transistor degradation mechanisms along with a dedicated reliability simulation framework. In this work, we present a study of the commercial aging models in a 28-nm CMOS technology from a designer perspective by comparison of the simulations with extensive measurement data at the device and the circuit level (ring oscillators). Moreover, using our custom table model compiled from our device-level measurement data, we model the BTI-driven component of circuit-level degradation and provide convincing evidence that mobility degradation due to NBTI plays an important role in the circuit aging phenomenon, thus emphasizing its need in SPICE-level NBTI models.
可靠性边际的缩小导致对电路老化模拟的需求不断增加,这使得产品可靠性评估能够在生产前进行。现代技术的物理设计套件(pdk)已经开始包括晶体管退化机制的紧凑模型以及专用的可靠性仿真框架。在这项工作中,我们从设计人员的角度对28纳米CMOS技术中的商业老化模型进行了研究,并将模拟与器件和电路级(环形振荡器)的大量测量数据进行了比较。此外,利用我们从设备级测量数据中编译的自定义表模型,我们建立了bti驱动的电路级退化组件的模型,并提供了令人信服的证据,证明由NBTI引起的迁移率退化在电路老化现象中起着重要作用,从而强调了在spice级NBTI模型中的必要性。
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引用次数: 0
Nickel Silicide Electromigration on Micro Ring Modulators for Silicon Photonics Technology 硅光子学微环调制器上的硅化镍电迁移
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118191
B. McGowan, M. Rakowski, Seungman Choi
Electromigration (EM) tests were performed on NiSi silicide heaters that are part of a photonic micro ring modulator (MRM). Measurement of the temperature kinetics of failure suggests an activation energy close to 2.0eV. Failure analyses confirm Ni migration is the failure mechanism. Reliability limits established by the EM tests combined with characterization of the MRM's temperature response quantifies the tradeoffs between device performance and reliability.
对作为光子微环调制器(MRM)一部分的NiSi硅化物加热器进行了电迁移(EM)测试。对失效温度动力学的测量表明,其活化能接近2.0eV。失效分析证实Ni迁移是失效机制。电磁测试建立的可靠性限制与MRM的温度响应特性相结合,量化了设备性能和可靠性之间的权衡。
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引用次数: 0
Estimation of SOH Degradation of Coin Cells Subjected to Accelerated Life Cycling with Randomized Cycling Depths and C-Rates 随机循环深度和c -速率下加速寿命循环下硬币电池SOH降解的估计
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117727
P. Lall, Ved Soni, Guneet Sethi, K. Yiang
Investigation of li-ion battery state of health (SOH) degradation and its modeling facilitates the determination of device warranty and can provide information about the device battery's health. For such studies, batteries undergo life-cycling tests with fixed cycling depths and charging currents (C-rates) across cycles, and the gathered degradation data is used for model development. However, in the real world, the cycling depth is generally not constant per cycle and varies across users. The SOH estimation of such use cases is challenging for lab-developed models. In this study, a semi-empirical SOH estimation regression model has been trained using fixed cycling depth and c-rate data and is validated using tests with randomized cycling depth and c-rate variation per cycle. Different upper and lower state of charge (SOC) limits were chosen to simulate different user profiles. Finally, multiple iterations of this model with different predictor variables have been tested to minimize the estimation error.
锂离子电池健康状态(SOH)退化的研究及其建模有助于确定设备保修,并可以提供有关设备电池健康状况的信息。在这类研究中,电池在固定的循环深度和充电电流(c -率)下进行寿命循环测试,收集到的退化数据用于模型开发。然而,在现实世界中,每个循环的循环深度通常不是恒定的,并且因用户而异。这些用例的SOH估计对于实验室开发的模型来说是具有挑战性的。本研究使用固定循环深度和c-速率数据训练半经验SOH估计回归模型,并使用随机循环深度和c-速率每周期变化的测试进行验证。选取不同的荷电上限和荷电下限来模拟不同的用户状态。最后,使用不同的预测变量对该模型进行多次迭代,以最小化估计误差。
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引用次数: 0
Analysis of Intermittent Single-bit Failure on 10-nm node generation DRAM Devices 10nm节点代DRAM器件的间歇单比特故障分析
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117671
H. Seo, T. Rim, Eunsun Lee, Sekyoung Jang, Kyosuk Chae, Jeonghoon Oh, H. Ban, Jooyoung Lee
The intermittent single-bit (SB) failure is one of the most important problems in DRAM technology development because it is almost impossible to reproduce and screen out. In this paper, the intermittent SB failure was analyzed theoretically. Based on our physical modeling, we suggested several technical methods to reduce the intermittent SB failure and got the experimental results that decrease the intermittent SB failure rate. Furthermore, we predicted the failure rate based on our theoretical model. The SB failure rate had over 85% consistency between prediction and results. Therefore, we proved that our failure modeling is appropriate for predicting the occurrence of the intermittent SB failure. Furthermore, we can propose the design of the next generation DRAM technology to achieve equivalent or better intermittent SB quality than the previous generation from the beginning of the development.
间歇性单比特(SB)故障是DRAM技术发展中最重要的问题之一,因为它几乎无法再现和屏蔽。本文从理论上分析了间歇式SB故障。在物理建模的基础上,提出了几种降低间歇SB故障率的技术方法,并得到了降低间歇SB故障率的实验结果。在此基础上,对系统的故障率进行了预测。SB失败率在预测和结果之间的一致性超过85%。因此,我们证明了我们的故障模型是适合于预测间歇性SB故障的发生。此外,我们可以从开发之初就提出设计下一代DRAM技术,以达到与上一代相同或更好的间歇性SB质量。
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引用次数: 0
The Effects of $gamma$ Radiation-Induced Trapped Charges on Single Event Transient in DSOI Technology $gamma$辐射诱捕电荷对DSOI技术单事件瞬态的影响
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118190
Yuchong Wang, Siyuan Chen, Fanyu Liu, Bo Li, Jiangjiang Li, Yang Huang, Tiexin Zhang, Xu Zhang, Zhengsheng Han, T. Ye, J. Wan
The effects of $gamma$ radiation-induced positive trapped charges in the top buried oxide layer $boldsymbol{(mathrm{Q}_{text{BOX}1})}$ on the single event transient (SET) response of Double Silicon-On-Insulator (DSOI) transistors are examined for the first time through $gamma$ radiation and pulsed laser experiments. After $gamma$ radiation, a significant negative shift of threshold voltage for back-channel is observed for both DSOI NMOS and PMOS due to the $mathrm{Q}_{text{BO}mathrm{X}1}$. The SET current was measured at the device level, and the SET current peak and full width at half maximum (FWHM) were calculated. The impact of $boldsymbol{mathrm{Q}_{text{BOX}1}}$ and back-gate bias on the SET current of the DSOI devices are analyzed in detail. The experiments demonstrate that the SET current of NMOS is enhanced due to the parasitic bipolar transistor (PBT) effect activated by $boldsymbol{mathrm{Q}_{text{BOX}1}}$, which can be mitigated by applying a dynamic back-gate bias. However, the $boldsymbol{mathrm{Q}_{text{BOX}1}}$ inhibits the SET current and PBT for DSOI PMOS. TCAD simulations further validate this physical mechanism, and then the back-gate bias strategy is proposed for DSOI devices and circuits.
本文通过脉冲激光实验和$gamma$辐射实验,首次研究了$gamma$辐射诱导的顶部埋藏氧化层$boldsymbol{( mathm {Q}_{text{BOX}1})}$对双绝缘体上硅(DSOI)晶体管单事件瞬态(SET)响应的影响。在$gamma$辐射后,由于$ mathm {Q}_{text{BO} mathm {X}1}$, DSOI NMOS和PMOS的后通道阈值电压都出现了显著的负移。在器件级测量SET电流,计算SET电流峰值和半最大值全宽(FWHM)。详细分析了$boldsymbol{ maththrm {Q}_{text{BOX}1}}$和后门偏置对DSOI器件SET电流的影响。实验表明,NMOS的SET电流是由$boldsymbol{mathrm{Q}_{text{BOX}1}}$激活的寄生双极晶体管(PBT)效应引起的,可以通过施加动态后门偏置来缓解。然而,$boldsymbol{mathrm{Q}_{text{BOX}1}}$抑制了DSOI PMOS的SET电流和PBT。TCAD仿真进一步验证了这一物理机制,然后提出了用于DSOI器件和电路的后门偏置策略。
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引用次数: 0
A Physical Unclonable Function Leveraging Hot Carrier Injection Aging 利用热载流子注入老化的物理不可克隆功能
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118128
R. Parker, J. Velamala, K. Shen, David Johnston, Yao-Feng Chang, S. Ramey, Siang-jhih Sean Wu, P. Penmatsa
Physical Unclonable Functions (PUFs) are low-cost cryptographic primitives used to generate unique, secure, and stable IDs for device authentication and secure communication. PUFs rely on process variation inherent in the manufacturing flow making it impossible to predict or clone chip IDs providing a high level of security and tamper resistance. A commonly studied PUF is the memory PUF which suffers high Bit Error Rate (BER) across environmental conditions. This paper introduces a novel NFET PUF featuring a Hot Carrier Injection (HCI) stress mechanism to lower BER to near zero. Post-Si data from a lkb PUF array fabricated in Intel4 FinFET technology is presented in comparison to a hybrid-SRAM style PUF. BER results were studied with different stress parameters enabling manufacturing flow for HCI based PUFs.
物理不可克隆函数(puf)是一种低成本的加密原语,用于为设备身份验证和安全通信生成唯一、安全且稳定的id。puf依赖于制造流程中固有的工艺变化,因此无法预测或克隆芯片id,从而提供高水平的安全性和抗篡改性。在各种环境条件下误码率较高的存储PUF是目前研究较多的PUF。本文介绍了一种具有热载流子注入(HCI)应力机制的新型NFET PUF,可将误码率降低到接近零。采用Intel4 FinFET技术制作的1 kb PUF阵列的后si数据与混合sram风格的PUF进行了比较。在不同应力参数下研究了基于HCI的puf的制造流程。
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引用次数: 1
期刊
2023 IEEE International Reliability Physics Symposium (IRPS)
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