J. A. Croon, Hans Tuinhout, R. Difrenza, J. Knol, A. J. Moonen, Stefaan Decoutere, Herman Maes, Willy Sansen
{"title":"A comparison of extraction techniques for threshold voltage mismatch","authors":"J. A. Croon, Hans Tuinhout, R. Difrenza, J. Knol, A. J. Moonen, Stefaan Decoutere, Herman Maes, Willy Sansen","doi":"10.1109/ICMTS.2002.1193202","DOIUrl":null,"url":null,"abstract":"In this paper commonly used extraction methods of MOSFET threshold voltage mismatch are compared. The V/sub T/ mismatch is extracted on the exact same device population by four independent characterization groups. Significant differences are observed, which are caused by differences in measurement setup and differences in extraction algorithm. The observed differences are analyzed. In addition merits and limitations of the various techniques are evaluated.","PeriodicalId":188074,"journal":{"name":"Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-04-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"44","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2002.1193202","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 44
Abstract
In this paper commonly used extraction methods of MOSFET threshold voltage mismatch are compared. The V/sub T/ mismatch is extracted on the exact same device population by four independent characterization groups. Significant differences are observed, which are caused by differences in measurement setup and differences in extraction algorithm. The observed differences are analyzed. In addition merits and limitations of the various techniques are evaluated.
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